The influence of deposition parameters on room temperature ozone sensing properties of InOx films

Sensors and Actuators, B: Chemical

Volumn 80, Issue 2, 2001, Pages 155-161

  Gagaoudakis, E ^a   Bender, M ^a   Douloufakis, E ^a   Katsarakis, N ^a   Natsakou, E ^a   Cimalla, V ^a   Kiriakidis, G ^a  

^a INSTITUTE OF ELECTRONIC STRUCTURE AND LASER   (Greece)

Author keywords

dc magnetron sputtering; Indium oxide thin films; Ozone sensor at room temperature

Indexed keywords

CHEMICAL SENSORS; DEPOSITION; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; PLASMA APPLICATIONS; SUBSTRATES; TEMPERATURE; ULTRAVIOLET RADIATION; X RAY DIFFRACTION ANALYSIS;

OPTICAL BAND GAPS; OZONE SENSING;

THIN FILMS;

EID: 0035923373     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00908-X     Document Type: Article

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