Solution-processed zinc oxide thin-film transistors with a low-temperature polymer passivation layer

IEEE Electron Device Letters

Volumn 33, Issue 10, 2012, Pages 1420-1422

  Xu, Xiaoli ^a   Feng, Linrun ^a   He, Shasha ^b   Jin, Yizheng ^b   Guo, Xiaojun ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

Passivation; solution process; thin film transistor (TFT); zinc oxide (ZnO)

Indexed keywords

AMBIENT ATMOSPHERE; ANNEALING TEMPERATURES; DEVICE PERFORMANCE; INTRINSIC PERFORMANCE; LOW TEMPERATURE POLYMERS; LOW TEMPERATURES; OUTPUT CONDUCTANCE; OXYGEN MOLECULE; PASSIVATION LAYER; SOLUTION PROCESS; SOLUTION-PROCESSED; THIN-FILM TRANSISTOR (TFTS); ZINC OXIDE (ZNO); ZINC PRECURSOR;

FIELD EFFECT TRANSISTORS; PASSIVATION; SEMICONDUCTING ORGANIC COMPOUNDS; SILICONES; TEMPERATURE; THIN FILM TRANSISTORS;

ZINC OXIDE;

EID: 84866903992     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2012.2210853     Document Type: Article

References (15)

1. J. F. Wager and R. Hoffman, "Thin, fast, and flexible," IEEE Spectr., vol. 48, no. 5, pp. 42-56, May 2011.
2. G. S. Herman, "Recent developments in printed transparent oxide semiconductors," in Proc. IDW Dig., 2011, pp. 1677-1679.
3. A. Bashir, P. H. Wobkenberg, J. Smith, J. M. Ball, G. Adamopoulos, D. D. C. Bradley, and T. D. Anthopoulos, "High-performance zinc oxide transistors and circuits fabricated by spray pyrolysis in ambient atmosphere," Adv. Mater., vol. 21, no. 21, pp. 2226-2231, Jun. 2009.
4. S. Hwang, J. H. Lee, C. H. Woo, J. Y. Lee, and H. K. Cho, "Effect of annealing temperature on the electrical performances of solutionprocessed InGaZnO thin film transistors," Thin Solid Films, vol. 519, no. 15, pp. 5146-5149, May 2011.
5. S. T. Meyers, J. T. Anderson, C. M. Hung, J. Thompson, J. F. Wager, and D. A. Keszler, "Aqueous inorganic inks for low-temperature fabrication of ZnO TFTs," J. Amer. Chem. Soc., vol. 130, no. 51, pp. 17 603-17 609, Dec. 2008.
6. T. Jun, Y. Jung, K. Song, and J. Moon, "Influences of pH and ligand type on the performance of inorganic aqueous precursor-derived ZnO thin film transistors," ACS Appl. Mater. Interfaces, vol. 3, no. 3, pp. 774-781, Mar. 2011.
7. Y. H. Yang, S. S. Yang, C. Y. Kao, and K.-S. Chou, "Chemical and electrical properties of low-temperature solution-processed In-Ga-Zn-O thin-film transistors," IEEE Electron Device Lett., vol. 31, no. 4, pp. 329-331, Apr. 2010.
8. M. G. Kim, M. G. Kanatzidis, A. Facchetti, and T. J. Marks, "Lowtemperature fabrication of high-performance metal oxide thin-film electronics via combustion processing," Nat. Mater., vol. 10, no. 5, pp. 382-388, May 2011.
9. J. F. Conley, "Instabilities in amorphous oxide semiconductor thin-film transistors," IEEE Trans. Device Mater. Rel., vol. 10, no. 4, pp. 460-475, Dec. 2010.
10. Y. C. Chen, T. C. Chang, H. W. Li, S. C. Chen, and J. Lu, "Biasinduced oxygen adsorption in zinc tin oxide thin film transistors under dynamic stress," Appl. Phys. Lett., vol. 96, no. 26, pp. 262104-1-262104-3, Jun. 2010.
11. W. T. Chen, S. Y. Lo, S. C. Kao, H. W. Zan, C. C. Tsai, J. H. Lin, C. H. Fang, and C. C. Lee, "Oxygen-dependent instability and annealing/ passivation effects in amorphous In-Ga-Zn-O thin-film transistors," IEEE Electron Device Lett., vol. 32, no. 11, pp. 1552-1554, Nov. 2011.
12. K. Nomura, T. Kamiya, and H. Hosono, "Stability and high-frequency operation of amorphous In-Ga-Zn-O thin-film transistors with various passivation layers," Thin Solid Films, vol. 520, no. 10, pp. 3778-3782, Mar. 2012.
13. S. H. Choi, J. H. Jang, J. J. Kim, and M. K. Han, "Low-temperature organic (CYTOP) passivation for improvement of electric characteristics and reliability in IGZO TFTs," IEEE Electron Device Lett., vol. 33, no. 3, pp. 381-383, Mar. 2012.
14. D. H. Cho, S. H. Yang, J. H. Shin, C. W. Byun, M. K. Ryu, J. I. Lee, C. S. Hwang, and H. Y. Chu, "Passivation of bottom-gate IGZO thin film transistors," J. Korean Phys. Soc., vol. 54, no. 1, pp. 531-534, Jan. 2009.
15. Y. Jin, J. Wang, B. Sun, J. C. Blakesley, and N. C. Greenham, "Solutionprocessed ultraviolet photodetectors based on colloidal ZnO nanoparticles," Nano Lett., vol. 8, no. 6, pp. 1649-1653, Jun. 2008.