Grazing-incidence small-angle X-ray scattering of soft and hard nanofabricated gratings

Journal of Applied Crystallography

Volumn 45, Issue 5, 2012, Pages 1038-1045

  Rueda, D R ^a   Martin Fabiani I ^a   Soccio, M ^a   Alayo, N ^b   Perez Murano F ^b   Rebollar, E ^c   Garcia Gutierrez M C ^a   Castillejo, M ^c   Ezquerra, T A ^a  

^a INSTITUTO DE ESTRUCTURA DE LA MATERIA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^c INSTITUTO DE QUÍMICA FÍSICA ROCASOLANO   (Spain)

Author keywords

diffraction gratings; grazing incidence small angle X ray scattering; nanofabrication

Indexed keywords

CRITICAL LENGTH; CRYSTALLINE LATTICE; FORM FACTORS; GI-SAXS; GRAZING INCIDENCE SMALL-ANGLE X-RAY SCATTERING; INCIDENCE ANGLES; LASER INDUCED; ORDERED POLYMERS; PERIODIC SURFACES; SCATTERING ANGLES; SPIN COATED POLYMERS;

APPROXIMATION THEORY; ELECTRON BEAM LITHOGRAPHY; NANOIMPRINT LITHOGRAPHY; NANOTECHNOLOGY; ONE DIMENSIONAL; POLYMER FILMS; X RAYS;

DIFFRACTION GRATINGS;

EID: 84866565577     PISSN: 00218898     EISSN: 16005767     Source Type: Journal    
DOI: 10.1107/S0021889812030415     Document Type: Article

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