Disturbance and response time improvement of submicrometer precision linear motion system by using modified disturbance compensator and internal model reference control

IEEE Transactions on Industrial Electronics

Volumn 60, Issue 1, 2013, Pages 139-150

  Chow, Hoi Wai ^a   Cheung, Norbert C ^a  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

Author keywords

Disturbance observer and compensator; internal model reference control (IMRC); permanent magnet linear motors (PMLMs)

Indexed keywords

ALGORITHMS; LINEAR MOTORS; OBSERVABILITY;

COMMAND SIGNAL; DISTURBANCE COMPENSATOR; DISTURBANCE OBSERVER; EXTERNAL DISTURBANCES; EXTERNAL FORCE; HIGH-PRECISION; INTERNAL MODELS; LINEAR MOTION SYSTEMS; PERMANENT MAGNET LINEAR MOTORS; POSITIONING CONTROL; PRECISION MOTION CONTROL; SUBMICROMETERS; UNKNOWN PARAMETERS; VARIABLE GAIN;

RESPONSE TIME (COMPUTER SYSTEMS);

EID: 84866269079     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2012.2185015     Document Type: Article

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