Precision motion control of a three degrees-of-freedom hybrid stage with dual actuators

IET Control Theory and Applications

Volumn 2, Issue 5, 2008, Pages 392-401

  Park, Y ^a  

^a SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CONFOCAL MICROSCOPY; DEGREES OF FREEDOM (MECHANICS); LINEAR MOTORS; PERTURBATION TECHNIQUES; PROBLEM SOLVING; THREE DIMENSIONAL;

CONFOCAL SCANNING MICROSCOPE; DUAL ACTUATORS; PRECISION MOTION CONTROL; THREE-DIMENSIONAL IMAGE;

MOTION CONTROL;

EID: 44649177642     PISSN: 17518644     EISSN: 17518652     Source Type: Journal    
DOI: 10.1049/iet-cta:20070054     Document Type: Article

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