Ultralow-loss polycrystalline silicon waveguides and high uniformity 1x12 MMI fanout for 3D photonic integration

Optics Express

Volumn 20, Issue 19, 2012, Pages 21722-21728

  Kwong, David ^a   Covey, John ^a   Hosseini, Amir ^a   Zhang, Yang ^a   Xu, Xiaochuan ^a   Chen, Ray T ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; ELECTRIC LOSSES; PHOTONIC INTEGRATION TECHNOLOGY; SILICON OXIDES; WAVEGUIDES;

BULK ABSORPTION; CRYSTALLINE SILICONS; FAN-OUT; HIGH UNIFORMITY; LOW INSERTION LOSS; MAXIMUM TEMPERATURE; MULTIMODES; PHOTONIC APPLICATION; PHOTONIC INTEGRATED CIRCUITS; PHOTONIC INTEGRATIONS; PROPAGATION LOSS; SOLID-PHASE CRYSTALLIZATION;

POLYSILICON;

EID: 84866253302     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.021722     Document Type: Article

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