Modeling and simulation of the MEMS vibratory gyroscope

InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITHERM

Volumn , Issue , 2012, Pages 928-933

  Patel, Chandradip ^a   McCluskey, Patrick ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

harsh environment; inertial sensors; MEMS vibratory gyroscope; temperature effects; temperature dependent bias

Indexed keywords

CHARACTERISTIC EQUATION; DAMPING COEFFICIENTS; DEEP WATER; DOWN-HOLE DRILLING; EFFECTS OF TEMPERATURE; FABRICATION TECHNOLOGIES; FIRST ORDER; HARSH ENVIRONMENT; INERTIAL SENSOR; MEMS GYROSCOPE; MEMS VIBRATORY GYROSCOPE; MODELING AND SIMULATION; SPRING STIFFNESS; SPRING-MASS-DAMPER SYSTEM; TEMPERATURE CONDITIONS; TEMPERATURE DEPENDENT; TEMPERATURE RANGE; TWO-DEGREE-OF-FREEDOM;

CLADDING (COATING); COMPUTER SIMULATION; ELECTRONICS ENGINEERING; EQUATIONS OF MOTION; TEMPERATURE; THERMAL EFFECTS;

GYROSCOPES;

EID: 84866172361     PISSN: 19363958     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ITHERM.2012.6231524     Document Type: Conference Paper

References (11)

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