Temperature dependent characteristics of the JPL silicon MEMS gyroscope

IEEE Aerospace Conference Proceedings

Volumn 1, Issue , 2000, Pages 403-411

  Shcheglov, K ^a   Evans, C ^a   Gutierrez, R ^a   Tang, T K ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AVIATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NAVIGATION; SPACE APPLICATIONS;

QUADRATURE DRIFTS; SIGNAL DRIFT; TEMPERATURE-DEPENDENT DRIFT;

GYROSCOPES;

EID: 0034432380     PISSN: 1095323X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. Silicon bulk micromachined vibratory gyroscope