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Journal of Physics: Conference Series
Volumn 34, Issue 1, 2006, Pages 757-763
Design, modelling and simulation of vibratory micromachined gyroscopes
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Indexed keywords

EID: 33744511273     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/34/1/125     Document Type: Article
Times cited : (45)
References (5)
  • 1
    • 0036544459 scopus 로고    scopus 로고
    • A symmetric surface micromachined gyroscope with decoupled oscillation modes
    • 0924-4247 A
    • Alper S E, Akin T 2002 A symmetric surface micromachined gyroscope with decoupled oscillation modes Sensors Actuators A (97-98) 347-358
    • (2002) Sensors Actuators , vol.97-98 , Issue.97-98 , pp. 347-358
    • Alper, S.E.1    Akin, T.2
  • 2
    • 27144432917 scopus 로고    scopus 로고
    • A single-crystalsilicon symmetrical and decoupled MEMS gyroscope on an insulating substrat
    • 10.1109/JMEMS.2005.845400 1057-7157
    • Alper S E, Akin T 2005 A single-crystalsilicon symmetrical and decoupled MEMS gyroscope on an insulating substrat J. Microelectromech. Syst (14) 707-717
    • (2005) J. Microelectromech. Syst , Issue.14 , pp. 707-717
    • Alper, S.E.1    Akin, T.2
  • 3
    • 33744532897 scopus 로고    scopus 로고
    • Kranz M 1998 Design, simulation and implementation of two novel micromechanical vibratory rate gyroscopes MS Thesis Department of ECE CMU
    • (1998)
    • Kranz, M.1
  • 4
    • 27144460891 scopus 로고    scopus 로고
    • Fluid effects in vibrating micromachined structures
    • 10.1109/JMEMS.2005.845425 1057-7157
    • Kwok P Y, Weinberg M S and Breur K S 2005 Fluid effects in vibrating micromachined structures J. Microelectromech. Syst. (14) 770-781
    • (2005) J. Microelectromech. Syst. , Issue.14 , pp. 770-781
    • Kwok, P.Y.1    Weinberg, M.S.2    Breur, K.S.3
  • 5
    • 0030091526 scopus 로고    scopus 로고
    • Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems
    • 0960-1317 036
    • Tilmans H A C 1996 Equivalent circuit representation of electromechanical transducers:I. lumped-parameter systems J. Micromech. Microeng 6 157-176
    • (1996) J. Micromech. Microeng , vol.6 , Issue.1 , pp. 157-176
    • Tilmans, H.A.C.1

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.