The effect of addition of Al in ZrO 2 thin film on its resistance to cracking

Surface and Coatings Technology

Volumn 207, Issue , 2012, Pages 355-360

  Musil, J ^a   Sklenka, J ^a   Cerstvy R ^a   Suzuki, T ^b   Mori, T ^b   Takahashi, M ^b  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

^b KEIO UNIVERSITY   (Japan)

Author keywords

Mechanical properties; Optical properties; Reactive magnetron sputtering; Resistance to cracking; Structure; Zr Al O film

Indexed keywords

AL CONTENT; DUAL MAGNETRONS; EFFECT OF ADDITION; ELASTIC RECOVERY; HIGH HARDNESS; INNER DIAMETERS; LOW HARDNESS; REACTIVE MAGNETRON SPUTTERING; RESISTANCE TO CRACKING; X-RAY AMORPHOUS; YOUNG'S MODULUS;

AMORPHOUS FILMS; CRYSTALLINE MATERIALS; HARDNESS; MECHANICAL PROPERTIES; OPTICAL PROPERTIES; STRUCTURE (COMPOSITION); THICK FILMS; ZIRCONIUM; ZIRCONIUM ALLOYS;

ALUMINUM;

EID: 84865704020     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2012.07.017     Document Type: Article

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