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Volumn 98, Issue , 2012, Pages 206-209
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Local ion irradiation of thin graphene films grown on SiC substrates
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Author keywords
FIB; Graphene; Nanopatterning; Surface defects
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Indexed keywords
CONDUCTIVE ATOMIC FORCE MICROSCOPY;
DOSE CONTROL;
FIB;
ION DOSE;
NANOPATTERNING;
SIC SUBSTRATES;
SURFACE PATTERNING;
TUNABLE TEMPLATES;
ATOMIC FORCE MICROSCOPY;
ELECTRONIC PROPERTIES;
GALLIUM ALLOYS;
IONS;
IRRADIATION;
RAMAN SPECTROSCOPY;
SILICON CARBIDE;
SURFACE DEFECTS;
GRAPHENE;
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EID: 84865609782
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2012.07.025 Document Type: Conference Paper |
Times cited : (6)
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References (12)
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