High speed quasi-monolithic silicon/piezostack SPM scanning stage

Microelectronic Engineering

Volumn 98, Issue , 2012, Pages 520-523

  Guliyev, E ^a   Michels, Th ^a   Volland, B E ^a   Ivanov, Tzv ^a   Hofer, M ^a   Rangelow, I W ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

High speed AFM; Micromachining; Nano positioning; Scanning force microscopy

Indexed keywords

EXPERIMENTAL SETUP; HIGH FREQUENCY; HIGH FREQUENCY HF; HIGH-SPEED AFM; KEY FEATURE; NANO-POSITIONING; PIEZOELECTRIC ACTUATION; PIEZOELECTRIC STACK; PIEZORESISTIVE SENSORS; SAMPLE HOLDERS; SCANNER DESIGNS; SCANNING STAGES; SELF-SENSING CANTILEVERS; SILICON MEMS;

ATOMIC FORCE MICROSCOPY; MICROMACHINING; MONOLITHIC INTEGRATED CIRCUITS; NANOCANTILEVERS; SCANNING TUNNELING MICROSCOPY;

SCANNING;

EID: 84865588843     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2012.07.059     Document Type: Conference Paper

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