Fabrication and size prediction of crystalline nanoparticles of silicon induced by nanogrinding with ultrafine diamond grits

Scripta Materialia

Volumn 67, Issue 7-8, 2012, Pages 657-660

  Zhang, Zhenyu ^a   Huo, Fengwei ^a   Zhang, Xianzhong ^a   Guo, Dongming ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Nanogrinding; Nanoparticle; Silicon; Transmission electron microscopy; Undeformed chip thickness

Indexed keywords

AVERAGE SIZE; CRYSTALLINE NANOPARTICLES; FACE GRINDING; NANO-GRINDING; PREDICTION MODEL; ROOM TEMPERATURE; SI NANOPARTICLES; ULTRAFINE DIAMOND; UNDEFORMED CHIP THICKNESS;

CRYSTALLINE MATERIALS; DEIONIZED WATER; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

NANOPARTICLES;

EID: 84865526623     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2012.07.016     Document Type: Article

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