Replication of a thin polydimethylsiloxane stamp and its application to dual-nanoimprint lithography for 3D hybrid nano/micropatterns

Journal of Nanoscience and Nanotechnology

Volumn 12, Issue 7, 2012, Pages 5489-5493

  Lim, Hyung Jun ^a   Lee, Jae Jong ^a,b   Park, Sunggook ^c   Choi, Kee Bong ^a   Kim, Gee Hong ^a   Park, Hyun Ha ^a   Ryu, Ji Hyeong ^b  

^a Korea Institute of Machine and Materials   (South Korea)

^b University of Science and Technology (UST)   (South Korea)

^c LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

Hybrid Pattern; Nanoimprint Lithography; PDMS Stamp; Three Dimensional Pattern

Indexed keywords

HYBRID PATTERN; LOW ELASTIC MODULUS; METAL RINGS; MICRO-SCALES; MICROMETER SCALE; MICROPATTERNS; MICROSTAMP; MOTHEYE; NANO PATTERN; NANO SCALE; NANO-METER SCALE; OPTICAL COMPONENTS; PDMS STAMP; POLYDIMETHYLSILOXANE STAMPS; THREE-DIMENSIONAL PATTERNS;

BIOSENSORS; FABRICATION; MATERIALS HANDLING; MICROCHANNELS; NANOIMPRINT LITHOGRAPHY; THREE DIMENSIONAL;

SILICONES;

EID: 84865109432     PISSN: 15334880     EISSN: 15334899     Source Type: Journal    
DOI: 10.1166/jnn.2012.6260     Document Type: Article

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