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Volumn 2, Issue 8, 2012, Pages 1229-1238

Wafer bumping, assembly, and reliability of fine-pitch lead-free micro solder joints for 3-D IC integration

Author keywords

Assembly; fine pitch solder; lead free solder microbumps; reliability

Indexed keywords

CHIP SIZES; CHIP-TO-WAFER BONDING TECHNIQUES; ELECTROPLATING TECHNIQUE; HEIGHT VARIATION; LAYER THICKNESS; LEAD FREE SOLDERS; LEAD-FREE; MICRO GAPS; MICRO-BUMPS; MICROBUMPING; RELIABILITY ASSESSMENTS; SCANNING ACOUSTIC TOMOGRAPHIES; SCANNING ELECTRONS; SHEAR TESTS; SI WAFER; SOLDER JOINTS; UNDERFILLS; WAFER BUMPING;

EID: 84864723913     PISSN: 21563950     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCPMT.2012.2189397     Document Type: Article
Times cited : (26)

References (17)
  • 5
    • 77955213590 scopus 로고    scopus 로고
    • High density interconnect at 10 μm pitch with mechanically keyed Cu/Sn-Cu and Cu-Cu bonding for 3-D integration
    • Las Vegas, NV, Jun.
    • J. D. Reed, M. Lueck, C. Gregory, A. Huffman, and J. M. Lannon, Jr., "High density interconnect at 10 μm pitch with mechanically keyed Cu/Sn-Cu and Cu-Cu bonding for 3-D integration," in Proc. IEEE Electron. Compon. Technol. Conf., Las Vegas, NV, Jun. 2010, pp. 846-852.
    • (2010) Proc. IEEE Electron. Compon. Technol. Conf. , pp. 846-852
    • Reed, J.D.1    Lueck, M.2    Gregory, C.3    Huffman, A.4    Lannon Jr., J.M.5
  • 6
    • 78651280731 scopus 로고    scopus 로고
    • Fine pitch Cu/Sn solid state diffusion bonding for making high yield bump interconnections and its application in 3-D integration
    • Berlin, Germany, Sep.
    • W. Zhang, P. Limaye, Y. Civale, R. Labie, and P. Soussan, "Fine pitch Cu/Sn solid state diffusion bonding for making high yield bump interconnections and its application in 3-D integration," in Proc. IEEE Electron. Syst. Int. Technol. Conf., Berlin, Germany, Sep. 2010, pp. 1-4.
    • (2010) Proc. IEEE Electron. Syst. Int. Technol. Conf. , pp. 1-4
    • Zhang, W.1    Limaye, P.2    Civale, Y.3    Labie, R.4    Soussan, P.5
  • 7
    • 0035455482 scopus 로고    scopus 로고
    • Morphological stability of solder reaction products in flip chip technology
    • K. N. Tu, F. Ku, and T.Y. Lee, "Morphological stability of solder reaction products in flip chip technology," J. Electron. Mater., vol. 30, no. 9, pp. 1129-1132, 2001.
    • (2001) J. Electron. Mater. , vol.30 , Issue.9 , pp. 1129-1132
    • Tu, K.N.1    Ku, F.2    Lee, T.Y.3
  • 8
    • 0036477480 scopus 로고    scopus 로고
    • Morphology, kinetics, and thermodynamics of solid-state aging of eutectic SnPb and Pb-free solders (Sn3.5Ag, Sn3.8Ag0.7Cu and Sn0.7Cu) on Cu
    • T. Y. Lee, W. J. Choi, K. N. Tu, J. W. Jang, S. M. Kuo, J. K. Lin, D. R. Frear, K. Zeng, and J. K. Kivilahti, "Morphology, kinetics, and thermodynamics of solid-state aging of eutectic SnPb and Pb-free solders (Sn3.5Ag, Sn3.8Ag0.7Cu and Sn0.7Cu) on Cu," J. Mater. Res., vol. 17, no. 2, pp. 291-301, 2002.
    • (2002) J. Mater. Res. , vol.17 , Issue.2 , pp. 291-301
    • Lee, T.Y.1    Choi, W.J.2    Tu, K.N.3    Jang, J.W.4    Kuo, S.M.5    Lin, J.K.6    Frear, D.R.7    Zeng, K.8    Kivilahti, J.K.9
  • 9
    • 69949125659 scopus 로고    scopus 로고
    • Growth mechanism of Ni3Sn4 in a Sn/Ni liquid/solid interfacial reaction
    • Oct.
    • J. Shen, Y. C. Chan, and S. Y. Liu, "Growth mechanism of Ni3Sn4 in a Sn/Ni liquid/solid interfacial reaction," Acta Mater., vol. 57, no. 17, pp. 5196-5206, Oct. 2009.
    • (2009) Acta Mater. , vol.57 , Issue.17 , pp. 5196-5206
    • Shen, J.1    Chan, Y.C.2    Liu, S.Y.3
  • 13
    • 43049116911 scopus 로고    scopus 로고
    • Phase transformation and morphology of the intermetallic compounds formed at the Sn9Zn3.5Ag/Cu interface in aging
    • M. H. Hon, T. C. Chang, and M. C. Wang, "Phase transformation and morphology of the intermetallic compounds formed at the Sn9Zn3.5Ag/Cu interface in aging," J. Alloys Compounds, vol. 458, no. 3, pp. 189-199, 2008.
    • (2008) J. Alloys Compounds , vol.458 , Issue.3 , pp. 189-199
    • Hon, M.H.1    Chang, T.C.2    Wang, M.C.3
  • 14
    • 0029223405 scopus 로고
    • Rapid formation of intermetallic compounds by interdiffusion in the Cu-Sn and Ni-Sn systems
    • S. Bader, W. Gust, and H. Hieber, "Rapid formation of intermetallic compounds by interdiffusion in the Cu-Sn and Ni-Sn systems," Acta Metall. Mater., vol. 43, no. 1, pp. 329-337, 1995.
    • (1995) Acta Metall. Mater. , vol.43 , Issue.1 , pp. 329-337
    • Bader, S.1    Gust, W.2    Hieber, H.3
  • 15
    • 30944450989 scopus 로고    scopus 로고
    • Fluxless wafer bonding with Sn-rich SnAu duallayer structure
    • J. Kim and C. C. Lee, "Fluxless wafer bonding with Sn-rich SnAu duallayer structure," Mater. Sci. Eng. A, vol. 417, nos. 1-2, pp. 143-148, 2006.
    • (2006) Mater. Sci. Eng. A , vol.417 , Issue.1-2 , pp. 143-148
    • Kim, J.1    Lee, C.C.2
  • 17
    • 79960408350 scopus 로고    scopus 로고
    • High throughput chip on wafer assembly technology and metallurgical reactions of Pb-free micro-joints within a 3-D IC package
    • Apr.
    • J. Y. Chang, "High throughput chip on wafer assembly technology and metallurgical reactions of Pb-free micro-joints within a 3-D IC package," in Proc. IEEE Int. Electron. Packag. Conf., Apr. 2010, pp. 159-164.
    • (2010) Proc. IEEE Int. Electron. Packag. Conf. , pp. 159-164
    • Chang, J.Y.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.