Fabrication of flexible device based on PAN-PZT thin films by laser lift-off process

Sensors and Actuators, A: Physical

Volumn 184, Issue , 2012, Pages 124-127

  Do, Young Ho ^a   Kang, Min Gyu ^a   Kim, Jin Sang ^a   Kang, Chong Yun ^a,b   Yoon, Seok Jin ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Korea University   (South Korea)

Author keywords

Ferroelectric properties; Films process; Functional applications; Laser lift off; PZT

Indexed keywords

FERROELECTRIC PROPERTY; FLEXIBLE DEVICE; FLEXIBLE ELECTRONIC DEVICES; FUNCTIONAL APPLICATIONS; LASER LIFT-OFF; PZT; SACRIFICIAL LAYER; STRUCTURAL AND ELECTRICAL PROPERTIES;

ELECTRIC PROPERTIES; FABRICATION; FERROELECTRIC FILMS; FERROELECTRICITY; LEAD; MANGANESE OXIDE; NIOBIUM OXIDE; ZIRCONIUM;

THIN FILMS;

EID: 84864703912     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.06.012     Document Type: Article

References (16)

1. M.A. Quevedo-Lopez, W.T. Wondmagegn, H.N. Alshareef, R. Ramirez-Bon, and B.E. Gnade Thin film transistors for flexible electronics: contacts, dielectrics and semiconductors Journal of Nanoscience Nanotechnology 11 2011 5532 5538
2. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono Room-temperature fabrication of transparent flexible thin film transistors using amorphous oxide semiconductors Nature 432 2004 488 492 (Pubitemid 39585210)
3. 4 Physical Review B 61 2000 1811 1816
4. J. Lee, D. Kim, D. Yang, S. Hong, K. Yoon, P. Hong, C. Jeong, H. Park, S.Y. Kim, S.L. Lim, S.S. Kim, K. Son, T. Kim, J. Kwon, and S. Lee World's largest (15-inch) XGA AMLCD panel using IGZO oxide TFT SID Int. Symp. Digest Tech. Papers, vol. 39 2008 625 628
5. Y. Chen, J. Au, P. Kazlas, A. Ritenour, H. Gates, and M. McCreary Electronic paper: flexible active-matrix electronic ink display Nature 423 2003 136 (Pubitemid 36569528)
6. S. Ju, A. Facchetti, Y. Xuan, J. Liu, F. Ishikawa, P. Ye, C. Zhou, T.J. Marks, and D.B. Janes Fabrication of fully transparent nanowire transistors for transparent and flexible electronics Nature Nanotechnology 2 2007 378 384 (Pubitemid 46878166)
7. M.C. McAlpine, H. Ahmad, D. Wang, and J.R. Heath Highly ordered nanowire arrays on plastic substrates for ultrasensitive flexible chemical sensors Nature Materials 6 2007 379 384 (Pubitemid 46695684)
8. X.L. Tong, L. Li, D.S. Zhnag, Y.T. Dai, D.J. Lv, K. Ling, Z.X. Liu, P.X. Lu, G. Yang, Z.Y. Yang, and H. Long The influences of laser scanning speed on the structural and optical properties of thin GaN films separated from sapphire substrates by excimer laser lift-off Journal of Physics D: Applied Physics 42 2009 045414
9. J.H. Cheon, J.H. Bae, and J. Jang Mechanical stability of poly-Si TFT on metal foil Solid-State Electronics 52 2008 473 477 (Pubitemid 351226146)
10. W.S. Wong, T. Sands, N.W. Cheung, M. Kneissi, D.P. Bour, P. Mei, L.T. Romano, and N.M. Johnson Fabrication of thin-film InGaN light-emitting diode membranes by laser lift-off Applied Physics Letters 75 1999 1360 1362 (Pubitemid 129304434)
11. M.K. Kelly, O. Ambacher, R. Dimitrov, R. Handschuh, and M. Stutzmann Optical process for liftoff of group III-nitride films Physica Status Solidi A 159 1 1997 R3 R4
12. C.H. Lee, S.J. Kim, Y.S. Oh, M.Y. Kim, Y.J. Yoon, and H.S. Lee Use of laser lift-off for flexible device applications Journal of Applied Physics 108 2010 102814 102818
13. 3 thin films on Si substrate Applied Physics A 81 2005 1059 1063 (Pubitemid 41202983)
14. J. Robertson, and W.L. Warren Energy levels of point defects in perovskite oxides Mater. Res. Soc. Symp. Proc., vol. 361 1994 123 128
15. W.D. Kingery, H.K. Bowen, and D.R. Uhlmann Introduction to Ceramics 1976 Wiley New York pp. 155-163
16. C.C. Hsiao, J.C. Ciou, A.S. Siao, and C.Y. Lee Temperature field analysis for PZT pyroelectric cells for thermal energy harvesting Sensors 11 2011 10458 10473