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Volumn 52, Issue 3, 2008, Pages 473-477

Mechanical stability of poly-Si TFT on metal foil

Author keywords

Mechanical stability; Metal foil; Metal induced crystallization with a nitride cap layer (MICC); Poly Si thin film transistor (TFT)

Indexed keywords

CARRIER MOBILITY; CRYSTALLIZATION; ELECTRIC PROPERTIES; METAL FOIL; POLYSILICON; TENSILE STRAIN; THIN FILM TRANSISTORS;

EID: 38949171392     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2007.10.019     Document Type: Article
Times cited : (20)

References (10)
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  • 2
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    • Integration of organic LEDs and amorphous Si TFTs onto flexible and lightweight metal foil substrates
    • Wu C.C., Theiuss S.D., Gu G., Lu M.H., Strum J.C., and Wagner S. Integration of organic LEDs and amorphous Si TFTs onto flexible and lightweight metal foil substrates. IEEE Electron Dev Lett 18 (1997) 609-612
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  • 4
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    • Excimer laser crystallization and doping of silicon films on plastic substrates
    • Smith P.M., Carey P.G., and Sigmon T.W. Excimer laser crystallization and doping of silicon films on plastic substrates. Appl Phys Lett 70 (1997) 342-344
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    • Smith, P.M.1    Carey, P.G.2    Sigmon, T.W.3
  • 6
    • 0037244776 scopus 로고    scopus 로고
    • Metal induced crystallization of amorphous silicon through a silicon nitride cap layer
    • Choi J.H., Kim D.Y., Choo B.K., Sohn W.S., and Jang J. Metal induced crystallization of amorphous silicon through a silicon nitride cap layer. Electrochem Solid-State Lett 6 (2003) G16-G18
    • (2003) Electrochem Solid-State Lett , vol.6
    • Choi, J.H.1    Kim, D.Y.2    Choo, B.K.3    Sohn, W.S.4    Jang, J.5
  • 7
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    • Crystallization orientation of polycrystalline silicon with disklike grains produced by silicide-mediated crystallization of amorphous silicon
    • Shon W.S., Choi J.H., Kim K.H., Oh J.H., Kim S.S., and Jnag J. Crystallization orientation of polycrystalline silicon with disklike grains produced by silicide-mediated crystallization of amorphous silicon. J Appl Phys 440 (2003) 4326-4331
    • (2003) J Appl Phys , vol.440 , pp. 4326-4331
    • Shon, W.S.1    Choi, J.H.2    Kim, K.H.3    Oh, J.H.4    Kim, S.S.5    Jnag, J.6
  • 9
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    • Mechanics of rollable and foldable film-on-foil electronics
    • Suo Z., Ma E.Y., Gleskova H., and Wagner S. Mechanics of rollable and foldable film-on-foil electronics. Appl Phys Lett 74 (1999) 1177-1179
    • (1999) Appl Phys Lett , vol.74 , pp. 1177-1179
    • Suo, Z.1    Ma, E.Y.2    Gleskova, H.3    Wagner, S.4
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    • Failure resistance of amorphous silicon transistors under extreme in-plane strain
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.