-
1
-
-
0033222020
-
Copper metallization reliability
-
DOI 10.1016/S0026-2714(99)00177-8
-
J. R. Lloyd, J. Clemens, and R. Snede, Microelectron. Reliab. 0026-2714 10.1016/S0026-2714(99)00177-8 39, 1595 (1999). (Pubitemid 32082111)
-
(1999)
Microelectronics Reliability
, vol.39
, Issue.11
, pp. 1595-1602
-
-
Lloyd, J.R.1
Clemens, J.2
Snede, R.3
-
2
-
-
20444459119
-
Electromigration and adhesion
-
DOI 10.1109/TDMR.2005.846308
-
J. R. Lloyd, M. W. Lane, E. G. Liniger, C.-K. Hu, T. M. Shaw, and R. Rosenberg, IEEE Trans. Device Mater. Reliab. 1530-4388 10.1109/TDMR.2005.846308 5, 113 (2005). (Pubitemid 40819632)
-
(2005)
IEEE Transactions on Device and Materials Reliability
, vol.5
, Issue.1
, pp. 113-118
-
-
Lloyd, J.R.1
Lane, M.W.2
Liniger, E.G.3
Hu, C.-K.4
Shaw, T.M.5
Rosenberg, R.6
-
3
-
-
0942277277
-
-
0026-2714 10.1016/j.microrel.2003.10.020
-
C. S. Hau-Riege, Microelectron. Reliab. 0026-2714 10.1016/j.microrel. 2003.10.020 44, 195 (2004).
-
(2004)
Microelectron. Reliab.
, vol.44
, pp. 195
-
-
Hau-Riege, C.S.1
-
4
-
-
80052426014
-
-
JVTAD6 0734-2101 10.1116/1.3622619
-
D. Choi, B. Wang, S. Chung, X. Liu, A. Darbal, A. Wise, N. T. Nuhfer, K. Barmak, A. Warren, K. R. Coffey, and M. F. Toney, J. Vac. Sci. Technol. A JVTAD6 0734-2101 10.1116/1.3622619 29, 051512 (2011).
-
(2011)
J. Vac. Sci. Technol. A
, vol.29
, pp. 051512
-
-
Choi, D.1
Wang, B.2
Chung, S.3
Liu, X.4
Darbal, A.5
Wise, A.6
Nuhfer, N.T.7
Barmak, K.8
Warren, A.9
Coffey, K.R.10
Toney, M.F.11
-
5
-
-
77955360675
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.81.155454
-
T. Sun, B. Yao, A. P. Warren, K. Barmak, M. F. Toney, R. E. Peale, and K. R. Coffey, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.81.155454 81, 155454 (2010).
-
(2010)
Phys. Rev. B
, vol.81
, pp. 155454
-
-
Sun, T.1
Yao, B.2
Warren, A.P.3
Barmak, K.4
Toney, M.F.5
Peale, R.E.6
Coffey, K.R.7
-
7
-
-
28044440082
-
Tungsten interconnects in the nano-scale regime
-
DOI 10.1016/j.mee.2005.07.033, PII S0167931705003515
-
W. Steinhögl, G. Steinlesberger, M. Perrin, G. Scheinbacher, G. Schindler, M. Traving, and M. Engelhardt, Microelectron. Eng. MIENEF 0167-9317 10.1016/j.mee.2005.07.033 82, 266 (2005). (Pubitemid 41690455)
-
(2005)
Microelectronic Engineering
, vol.82
, Issue.3-4 SPEC. ISS.
, pp. 266-272
-
-
Steinhogl, W.1
Steinlesberger, G.2
Perrin, M.3
Scheinbacher, G.4
Schindler, G.5
Traving, M.6
Engelhardt, M.7
-
8
-
-
0000225077
-
-
JAPIAU 0021-8979 10.1063/1.336010
-
A. J. Learn and D. W. Foster, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.336010 58, 2001 (1985).
-
(1985)
J. Appl. Phys.
, vol.58
, pp. 2001
-
-
Learn, A.J.1
Foster, D.W.2
-
10
-
-
0036026385
-
Phase transformation of thin sputter-deposited tungsten films at room temperature
-
DOI 10.1116/1.1506905
-
S. M. Rossnagel, I. C. Noyan, and C. Cabral Jr., J. Vac. Sci. Technol. B JVTBD9 0734-211X 10.1116/1.1506905 20, 2047 (2002). (Pubitemid 35354114)
-
(2002)
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
, vol.20
, Issue.5
, pp. 2047-2051
-
-
Rossnagel, S.M.1
Noyan, I.C.2
Cabral Jr., C.3
-
11
-
-
84957162876
-
-
PCPSA4 0305-0041 10.1017/S0305004100019952
-
K. Fuchs, Proc. Cambridge Philos. Soc. PCPSA4 0305-0041 10.1017/S0305004100019952 34, 100 (1938).
-
(1938)
Proc. Cambridge Philos. Soc.
, vol.34
, pp. 100
-
-
Fuchs, K.1
-
12
-
-
84933207793
-
-
ADPHAH 0001-8732 10.1080/00018735200101151
-
E. H. Sondheimer, Adv. Phys. ADPHAH 0001-8732 10.1080/00018735200101151 1, 1 (1952).
-
(1952)
Adv. Phys.
, vol.1
, pp. 1
-
-
Sondheimer, E.H.1
-
13
-
-
25944438622
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.1.1382
-
A. F. Mayadas and M. Shatzkes, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.1.1382 1, 1382 (1970).
-
(1970)
Phys. Rev. B
, vol.1
, pp. 1382
-
-
Mayadas, A.F.1
Shatzkes, M.2
-
14
-
-
84864599662
-
-
Ph.D. thesis, Carnegie Mellon University, Pittsburgh, PA
-
D. Choi, Ph.D. thesis, Carnegie Mellon University, Pittsburgh, PA, 2011.
-
(2011)
-
-
Choi, D.1
-
16
-
-
70449533121
-
-
CPHCBZ 0010-4655 10.1016/j.cpc.2009.07.007
-
X. Gonze, B. Amadon, P.-M. Anglade, J.-M. Beuken, F. Bottin, P. Boulanger, F. Bruneval, D. Caliste, R. Caracas, M. Côté, T. Deutsch, L. Genovese, Ph. Ghosez, M. Giantomassi, S. Goedecker, D. R. Hamann, P. Hermet, F. Jollet, G. Jomard, S. Leroux, M. Mancini, S. Mazevet, M. J. T. Oliveira, G. Onida, Y. Pouillon, T. Rangel, G.-M. Rignanese, D. Sangalli, R. Shaltaf, M. Torrent, M. J. Verstraete, G. Zerah, and J. W. Zwanziger, Comput. Phys. Commun. CPHCBZ 0010-4655 10.1016/j.cpc.2009.07.007 180, 2582 (2009).
-
(2009)
Comput. Phys. Commun.
, vol.180
, pp. 2582
-
-
Gonze, X.1
Amadon, B.2
Anglade, P.-M.3
Beuken, J.-M.4
Bottin, F.5
Boulanger, P.6
Bruneval, F.7
Caliste, D.8
Caracas, R.9
Côté, M.10
Deutsch, T.11
Genovese, L.12
Ghosez, Ph.13
Giantomassi, M.14
Goedecker, S.15
Hamann, D.R.16
Hermet, P.17
Jollet, F.18
Jomard, G.19
Leroux, S.20
Mancini, M.21
Mazevet, S.22
Oliveira, M.J.T.23
Onida, G.24
Pouillon, Y.25
Rangel, T.26
Rignanese, G.-M.27
Sangalli, D.28
Shaltaf, R.29
Torrent, M.30
Verstraete, M.J.31
Zerah, G.32
Zwanziger, J.W.33
more..
-
18
-
-
0141991888
-
-
CMMSEM 0927-0256 10.1016/S0927-0256(03)00104-6
-
A. Kokalj, Comput. Mater. Sci. CMMSEM 0927-0256 10.1016/S0927-0256(03) 00104-6 28, 155 (2003).
-
(2003)
Comput. Mater. Sci.
, vol.28
, pp. 155
-
-
Kokalj, A.1
-
20
-
-
36448999665
-
-
APPLAB 0003-6951 10.1063/1.114313
-
M. Yoshimoto, T. Maeda, T. Ohnishi, H. Koinuma, O. Ishiyama, M. Shinohara, M. Kubo, R. Miura, and A. Miyamoto, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.114313 67, 2615 (1995).
-
(1995)
Appl. Phys. Lett.
, vol.67
, pp. 2615
-
-
Yoshimoto, M.1
Maeda, T.2
Ohnishi, T.3
Koinuma, H.4
Ishiyama, O.5
Shinohara, M.6
Kubo, M.7
Miura, R.8
Miyamoto, A.9
-
21
-
-
0035904906
-
The growth and structure of epitaxial niobium on sapphire
-
DOI 10.1016/S0040-6090(01)01631-5, PII S0040609001016315
-
A. R. Wildes, J. Mayer, and K. Theis-Bröhl, Thin Solid Films THSFAP 0040-6090 10.1016/S0040-6090(01)01631-5 401, 7 (2001). (Pubitemid 33127956)
-
(2001)
Thin Solid Films
, vol.401
, Issue.1-2
, pp. 7-34
-
-
Wildes, A.R.1
Mayer, J.2
Theis-Brohl, K.3
-
23
-
-
36049057109
-
-
PHRVAO 0031-899X 10.1103/PhysRev.144.484
-
D. M. Sparlin and J. A. Marcus, Phys. Rev. PHRVAO 0031-899X 10.1103/PhysRev.144.484 144, 484 (1966).
-
(1966)
Phys. Rev.
, vol.144
, pp. 484
-
-
Sparlin, D.M.1
Marcus, J.A.2
-
28
-
-
84864578872
-
-
[http://www.hbcpnetbase.com/].
-
-
-
-
29
-
-
0039637947
-
-
O. F. J. JMMMDC 0304-8853 10.1016/0304-8853(93)91157-3
-
N. Cherief, D. Givord, A. Liénard, K. Mackay, O. F. K. McGrath, J. P. Rebouillat, F. Robaut, and Y. Souche, J. Magn. Magn. Mater. JMMMDC 0304-8853 10.1016/0304-8853(93)91157-3 121, 94 (1993).
-
(1993)
J. Magn. Magn. Mater.
, vol.121
, pp. 94
-
-
Cherief, N.1
Givord, D.2
Liénard, A.3
MacKay, K.4
McGrath, K.5
Rebouillat, P.6
Robaut, F.7
Souche, Y.8
-
30
-
-
19744383979
-
Reduction of the threading dislocation density in GaN films grown on vicinal sapphire (0001) substrates
-
DOI 10.1063/1.1849836, 021912
-
X. Q. Shen, H. Matsuhata, and H. Okumura, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1849836 86, 021912 (2005). (Pubitemid 40211642)
-
(2005)
Applied Physics Letters
, vol.86
, Issue.2
, pp. 0219121-0219123
-
-
Shen, X.Q.1
Matsuhata, H.2
Okumura, H.3
-
32
-
-
0033898337
-
Misfit dislocations of epitaxial (110) niobium∥(1120) sapphire interfaces grown by molecular beam epitaxy
-
DOI 10.1016/S0040-6090(99)00675-6
-
E. J. Grier, M. L. Jenkins, A. K. Petford-Long, R. C. C. Ward, and M. R. Wells, Thin Solid Films THSFAP 0040-6090 10.1016/S0040-6090(99)00675-6 358, 94 (2000). (Pubitemid 30526424)
-
(2000)
Thin Solid Films
, vol.358
, Issue.1
, pp. 94-98
-
-
Grier, E.J.1
Jenkins, M.L.2
Petford-Long, A.K.3
Ward, R.C.C.4
Wells, M.R.5
-
34
-
-
36048976290
-
Electron scattering at single crystal Cu surfaces
-
DOI 10.1016/j.tsf.2007.07.146, PII S004060900701262X
-
J. M. Purswani and D. Gall, Thin Solid Films THSFAP 0040-6090 10.1016/j.tsf.2007.07.146 516, 465 (2007). (Pubitemid 350102601)
-
(2007)
Thin Solid Films
, vol.516
, Issue.2-4
, pp. 465-469
-
-
Purswani, J.M.1
Gall, D.2
|