Active oxygen sensors used a quartz crystal microbalance (QCM) with sputter-coated and spin-coated poly(tetrafluoroethylene) thin films

Sensors and Actuators, B: Chemical

Volumn 171-172, Issue , 2012, Pages 769-776

  Iwamori, Satoru ^a   Yoshino, Kiyoshi ^b   Matsumoto, Hiroyuki ^b   Noda, Kazutoshi ^c   Nishiyama, Itsuo ^d  

^a TOKAI UNIVERSITY   (Japan)

^b Iwasaki Electric Co Ltd   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^d Daipla Wintes Co Ltd   (Japan)

Author keywords

Active oxygen; Poly(tetrafluoroethylene); Quartz crystal microbalance (QCM); R.f. sputtering; Spin coating

Indexed keywords

ACTIVE OXYGEN; COMPLEX STRUCTURE; FLUOROCARBON POLYMERS; FLUOROCARBON THIN FILMS; FREQUENCY SHIFT; ORGANIC THIN FILMS; PRISTINE MATERIALS; QUARTZ CRYSTAL; R.F. SPUTTERING; SPUTTERED THIN FILMS; ULTRAVIOLET IRRADIATIONS;

COATINGS; IONIZATION OF GASES; OXYGEN SENSORS; POLYTETRAFLUOROETHYLENES; QUARTZ; QUARTZ CRYSTAL MICROBALANCES; SPIN COATING; SURFACE PROPERTIES; THIN FILMS;

FILM PREPARATION;

EID: 84864288335     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.05.070     Document Type: Article

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