Molecular structures and tribological properties of sputtered poly (fluorocarbon) thin films

Zairyo/Journal of the Society of Materials Science, Japan

Volumn 57, Issue 6, 2008, Pages 611-616

  Iwamori, Satoru ^a   Keduka, Kazuya ^a   Uemura, Akihiro ^a  

^a KANAZAWA UNIVERSITY   (Japan)

Author keywords

CF4; Friction coefficient; PE; PTFE; PVDF; Sputtering; Wear durability

Indexed keywords

CF4; FRICTION COEFFICIENT; PE; PTFE; PVDF; SPUTTERING; WEAR DURABILITY;

ABS RESINS; ARGON; COPPER; INERT GASES; PHOTORESISTS; THIN FILMS;

POLYMER FILMS;

EID: 50649124223     PISSN: 05145163     EISSN: None     Source Type: Journal    
DOI: 10.2472/jsms.57.611     Document Type: Article

References (10)

1. S. Iwamori, Y. Ono and Y. Yamada, "Evaluation of Polytetrafluoroethylene Thin Film Deposited by Vacuum Evaporation", Material Science and Technology, Vol.42, No.1, pp.43-48 (2005).
2. Y. Nagayama, S. Iwamori and Y. Yamada, "Mechanical Properties of Polytetrafluoroethylene (PTFE) Thin Film Sputtered on the Metal Substrates", Journal of the Vacuum Society of Japan, Vol.46, No.12, pp.827-834 (2003).
3. S. Iwamori and M. Mizoguchi, "Adhesion and friction properties of the polytetrafluoroethylene-polyvinylalchol composite thin films prepared by spin coating", Material Science and Technology, Vol.43, No1, pp.41-47 (2006).
4. Y. Yamada, S. Iwamori and Y. Takahashi, "Chemical structures of the polytetrafluoroethylene thin films prepared by RF sputtering", Journal of the Vacuum Society of Japan, Vol.47, No.7, pp.575-580 (2004).
5. S. Iwamori and A. Uemura, "Copper-fluorocarbon composite thin films by prepared by RF sputtering", Technical report of IEICE, OME2004-96, pp.25-28 (2004).
6. H. Biederman, M. Zeuner, J. Zalman, P. Bílková, D. Slavínská, V. Stelmasuk and A. Boldyreva, "Rf magnetron sputtering of polytetrafluoroethylene under various conditions", Thin Solid Films, Vol.392, No.2, pp.208-213 (2001).
7. I. Kholodkov, H. Biederman, D. Slavínská, A. Choukourov and M. Trchova, "Plasma polymers prepared by RF sputtering of polyethylene". Vacuum, Vol.70, pp.505-509 (2003).
8. Y. Yamada and T. Kurobe, "X-ray Photoelectron spectroscopy of fluorocarbon films deposited by rf sputtering", Japanese Journal of Applied Physics, Vol.32, pp.5090-5094 (1993).
9. C. M. Simon and W. Kaminsky, "Chemical recycling of polytetrafluoroethylene by pyrolysis", Polymer Degradation and Stability, Vol.62, pp. 1-7 (1998).
10. J. W. Coburn and H. F. Winters, "Plasma etching-A discussion of mechanisms", Journal of Vacuum Science & Technology, Vol.16, pp.391-403 (1979).