RF sputtering of polymers and its potential application

Vacuum

Volumn 59, Issue 2-3, 2000, Pages 594-599

  Biederman, H ^a  

^a CHARLES UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000785854     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00321-3     Document Type: Article

References (21)

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