Controlling the growth of Si/Ge nanowires and heterojunctions using silver-gold alloy catalysts

ACS Nano

Volumn 6, Issue 7, 2012, Pages 6407-6415

  Chou, Yi Chia ^a   Wen, Cheng Yen ^a,d   Reuter, Mark C ^b   Su, Dong ^c   Stach, Eric A ^a,c   Ross, Frances M ^b  

^a PURDUE UNIVERSITY   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

^c BROOKHAVEN NATIONAL LABORATORY   (United States)

^d NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

AgAu alloys; in situ transmission electron microscopy; nanowire growth; Si Ge heterojunctions; vapor solid solid growth

Indexed keywords

ALLOY CATALYST; CATALYST PHASE; CRYSTAL SHAPES; ENVIRONMENTAL STABILITY; IN-SITU TRANSMISSION; NANOWIRE GROWTH; NANOWIRE HETEROSTRUCTURES; NANOWIRE STRUCTURES; ORIENTATION RELATIONSHIP; REPRODUCIBILITIES; SI/GE; UNIFORM DIAMETER; VAPOR-LIQUID-SOLID;

CATALYSTS; CRYSTAL ORIENTATION; IN SITU PROCESSING; NANOWIRES; SILVER ALLOYS; TRANSMISSION ELECTRON MICROSCOPY; VAPORS;

HETEROJUNCTIONS;

EID: 84864211021     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn301978x     Document Type: Article

References (37)

1. Gudiksen, M. S.; Lauhon, L. J.; Wang, J.; Smith, D. C.; Lieber, C. M. Growth of Nanowire Superlattice Structures for Nanoscale Photonics and Electronics Nature 2002, 415, 617-620 (Pubitemid 34136383)
2. Yang, C.; Zhong, Z.; Lieber, C. M. Encoding Electronic Properties by Synthesis of Axial Modulation-Doped Silicon Nanowires Science 2005, 310, 1304-1307 (Pubitemid 41698857)
3. Björk, M. T.; Thelander, C.; Hansen, A. E.; Jensen, L. E.; Larsson, M. W.; Wallenberg, L. R.; Samuelson, L. Few-Electron Quantum Qots in Nanowires Nano Lett. 2004, 4, 1621-1625
4. Li, D.; Wu, Y.; Fan, R.; Yang, P.; Majumdar, A. Thermal Conductivity of Si/SiGe Superlattice Nanowires Appl. Phys. Lett. 2003, 83, 3186-3188
5. Wagner, R. S.; Ellis, W. C. Vapor-Liquid-Solid Mechanism of Single Crystal Growth Appl. Phys. Lett. 1964, 4, 89-90
6. Wagner, R. S., VLS Mechanism of VLS Growth. In Whisker Technology; Levitt, A. P., Ed.; Willey Interscience: New York, 1970; p 47.
7. Li, N.; Tan, T. Y.; Gösele, U. Transition Region Width of Nanowire Hetero- and pn-Junctions Grown Using Vapor-Liquid-Solid Processes Appl. Phys. A: Mater. Sci. Process. 2008, 90, 591-596
8. x Heterostructure Nanowires Nano Lett. 2008, 8, 1246-1252
9. Perea, D. E.; Li, N.; Dickerson, R. M.; Misra, A.; Picraux, S. T. Controlling Heterojunction Abruptness in VLS-grown Semiconductor Nanowires via in Situ Catalyst Alloying Nano Lett. 2011, 11, 3117-3122
10. Ben-Ishai, M.; Patolsky, F. From Crystalline Germanium-Silicon Axial Heterostructures to Silicon Nanowire-Nanotubes Nano Lett. 2012, 12, 1121-1128
11. Wen, C.-Y.; Reuter, M. C.; Bruley, J.; Tersoff, J.; Kodambaka, S.; Stach, E. A.; Ross, F. M. Formation of Compositionally Abrupt Axial Heterojunctions in Silicon-Germanium Nanowires Science 2009, 326, 1247-1250
12. Schmidt, V.; Wittemann, J. V.; Gösele, U. Growth, Thermodynamics, and Electrical Properties of Silicon Nanowires Chem. Rev. 2010, 110, 361-388
13. Prince, A. Silver-Gold-Silicon. In Thermodynamic Properties, Ternary Alloy Systems: Phase Diagrams, Crystallographic and Thermodynamic Data Critically Evaluated by MSIT; Springer-Verlag: New York, 2006, (updated by Fabrichnaya, O.).
14. Wang, Y.; Schmidt, V.; Senz, S.; Gösele, U. Epitaxial Growth of Silicon Nanowires Using an Aluminium Catalyst Nat. Nanotechnol. 2006, 1, 186-189
15. Wacaser, B. A.; Reuter, M. C.; Khayyat, M. M.; Wen, C.-Y.; Haight, R.; Guha, S.; Ross, F. M. Growth System, Structure, and Doping of Aluminum-Seeded Epitaxial Silicon Nanowires Nano Lett. 2009, 9, 3296-3301
16. Nebol'sin, V. A.; Shchetinin, A. A.; Dolgachev, A. A.; Korneeva, V. V. Effect of the Nature of the Metal Solvent on the Vapor-Liquid-Solid Growth Rate of Silicon Whiskers Inorg. Mater. 2005, 41, 1256-1259 (Pubitemid 41803668)
17. Wagner, R. S.; Ellis, W. C. Vapor-Liquid-Solid Mechanism of Crystal Growth and its Application to Silicon Trans. Met. Soc. AIME 1965, 233, 1053-1064
18. Wittemann, J. V.; Münchgesang, W.; Senz, S.; Schmidt, V. Silver Catalyzed Ultrathin Silicon Nanowires Grown by Low-Temperature Chemical-Vapor-Deposition J. Appl. Phys. 2010, 107, 096105
19. Ross, F. M.; Tersoff, J.; Reuter, M. C. Sawtooth Faceting in Silicon Nanowires Phys. Rev. Lett. 2005, 95, 146104
20. Wagner, R. S. Defects in Silicon Crystals Grown by the VLS Technique J. Appl. Phys. 1967, 38, 1554
21. Kim, B. J.; Tersoff, J.; Kodambaka, S.; Reuter, M. C.; Stach, E. A.; Ross, F. M. Kinetics of Individual Nucleation Events Observed in Nanoscale Vapor-Liquid-Solid Growth Science 2008, 322, 1070-1073
22. Hofmann, S.; Sharma, R.; Wirth, C. T.; Cervantes-Sodi, F.; Ducati, C.; Kasama, T.; Dunin-Borkowski, R. E.; Drucker, J.; Bennett, P.; Robertson, J. Ledge-Flow-Controlled Catalyst Interface Dynamics during Si Nanowire Growth Nat. Mater. 2008, 7, 372-375 (Pubitemid 351585225)
23. Kim, B. J.; Tersoff, J.; Wen, C. Y.; Reuter, M. C.; Stach, E. A.; Ross, F. M. Determination of Size Effects during the Phase Transition of a Nanoscale Au-Si Eutectic Phys. Rev. Lett. 2009, 103, 155701
24. Gamalski, A. D.; Tersoff, J.; Sharma, R.; Ducati, C.; Hofmann, S. Formation of Metastable Liquid Catalyst during Subeutectic Growth of Germanium Nanowires Nano Lett. 2010, 10, 2972-2976
25. Kodambaka, S.; Tersoff, J.; Ross, F. M. Ge Nanowire Growth below the Eutectic Temperature Science 2007, 316, 729-732
26. Alloyeau, D.; Prévot, G.; Le Bouar, Y.; Oikawa, T.; Langlois, C.; Loiseau, A.; Ricolleau, C. Ostwald Ripening in Nanoalloys: When Thermodynamics Drives a Size-Dependent Particle Composition Phys. Rev. Lett. 2010, 105, 255901
27. Wu, Y.; Jiang, P.; Jiang, M.; Wang, T. W.; Guo, C. F.; Xie, S. S.; Wang, Z. L. The Shape Evolution of Gold Seeds and Gold@Silver Core-Shell Nanostructures Nanotechnology 2009, 20, 305602
28. Kodambaka, S.; Tersoff, J.; Reuter, M. C.; Ross, F. M. Diameter-Independent Kinetics in the Vapor-Liquid-Solid Growth of Si Nanowires Phys. Rev. Lett. 2006, 96, 096105
29. 2 Catalyst Prepared by Deposition-Precipitation: High Activity and Stability in CO Oxidation J. Catal. 2011, 281, 40-49
30. Wang, Z.; Wynblatt, P. The Equilibrium Form of Pure Gold Crystals Surf. Sci. 1998, 398, 259-266 (Pubitemid 128682527)
31. Wiley, B.; Sun, Y.; Xia, Y. Synthesis of Silver Nanostructures with Controlled Shapes and Properties Acc. Chem. Res. 2007, 40, 1067-1076
32. Wen, C.-Y.; Reuter, M. C.; Tersoff, J.; Stach, E. A.; Ross, F. M. Structure, Growth Kinetics, and Ledge Flow during Vapor-Solid-Solid Growth of Copper-Catalyzed Silicon Nanowires Nano Lett. 2010, 10, 514-519
33. Hannon, J. B.; Kodambaka, S.; Ross, F. M.; Tromp, R. M. The Influence of the Surface Migration of Gold on the Growth of Silicon Nanowires Nature 2006, 440, 69-71 (Pubitemid 43336267)
34. Madras, P.; Dailey, E.; Drucker, J. Spreading of Liquid AuSi on Vapor-Liquid-Solid-Grown Si Nanowires Nano Lett. 2010, 10, 1759-1763
35. Dailey, E.; Madras, P.; Drucker, J. Au on Vapor-Liquid-Solid Grown Si Nanowires: Spreading of Liquid AuSi from the Catalytic Seed J. Appl. Phys. 2010, 108, 064320
36. Larsson, M. W.; Wagner, J. B.; Wallin, M.; Hǎkansson, P.; E Fröberg, L.; Samuelson, L.; Wallenberg, L. R. Strain Mapping in Free-Standing Heterostructured Wurtzite InAs/InP Nanowires Nanotechnology 2007, 18, 015504
37. Swadener, J. G.; Picraux, S. T. Strain Distributions and Electronic Property Modifications in Si/Ge Axial Nanowire Heterostructures J. Appl. Phys. 2009, 105, 044310