SCOPUS 정보 검색 플랫폼

Applied Physics Letters

Volumn 101, Issue 2, 2012, Pages

Increased dissipation from distributed etch holes in a lateral breathing mode silicon micromechanical resonator

(2) Tu, Cheng a Lee, Joshua E Y a

a CITY UNIVERSITY OF HONG KONG (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ANCHOR LOSS; BREATHING MODES; DESIGN FEATURES; DISSIPATION FACTORS; ETCH HOLE; FINITE ELEMENT MODELS; FREE-STANDING STRUCTURES; MEASUREMENT RESULTS; QUALITY FACTORS; SILICON ON INSULATOR; SQUARE-EXTENSIONAL MODES; THERMOELASTIC DAMPING;

FACTOR ANALYSIS;

MICROMECHANICAL RESONATORS;

EID: 84863976334 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.4733728 Document Type: Article

Times cited : (17)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.