Exploitation of multiple incidences spectrometric measurements for thin film reverse engineering

Optics Express

Volumn 20, Issue 14, 2012, Pages 15734-15751

  Gao, Lihong ^a   Lemarchand, Fabien ^a   Lequime, Michel ^a  

^a AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; GLOBAL OPTIMIZATION; OPTICAL CONSTANTS; REVERSE ENGINEERING; THIN FILMS;

ANGLES OF INCIDENCE; DIELECTRIC FILTERS; GLOBAL OPTIMIZATION ALGORITHM; INCIDENCE ANGLES; MATHEMATICAL SOLUTIONS; MULTILAYER THIN-FILM STACKS; NUMBER OF LAYERS; OPTIMIZATION PROCEDURES; REFLECTANCE SPECTRUM; REVERSE ENGINEERING PROCESS; SINGLE-LAYER STRUCTURE; SPECTROMETRIC MEASUREMENTS; VARIABLE PARAMETERS; VISIBLE AND NEAR INFRARED;

FILM PREPARATION;

EID: 84863754612     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.015734     Document Type: Article

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