Effects of substrate bias on the structure and mechanical properties of (Al 1.5CrNb 0.5Si 0.5Ti)N x coatings

Thin Solid Films

Volumn 520, Issue 19, 2012, Pages 6183-6188

  Shen, Wan Jui ^a   Tsai, Ming Hung ^a   Chang, Yee Shyi ^a   Yeh, Jien Wei ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Grain size; Hardness; High entropy alloys; High entropy alloy nitrides; Intrinsic stress; Magnetron sputtering; Multi component nitrides; Preferred orientation

Indexed keywords

GRAIN SIZE; HIGH ENTROPY ALLOYS; INTRINSIC STRESS; MULTI-COMPONENT NITRIDE; PREFERRED ORIENTATIONS;

ALLOYS; ALUMINUM; COATINGS; ENTROPY; GRAIN SIZE AND SHAPE; HARDNESS; MAGNETRON SPUTTERING; SILICON; SODIUM CHLORIDE; TITANIUM ALLOYS;

TITANIUM NITRIDE;

EID: 84863576256     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2012.06.002     Document Type: Article

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