Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin film

ACS Nano

Volumn 6, Issue 2, 2012, Pages 1410-1415

  Lomonosov, Alexey M ^a,b   Ayouch, Adil ^a   Ruello, Pascal ^a   Vaudel, Gwenaelle ^a   Baklanov, Mikhail R ^c   Verdonck, Patrick ^c   Zhao, Larry ^c   Gusev, Vitalyi E ^a  

^a UNIVERSITÉ DU MAINE   (France)

^b PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^c IMEC   (Belgium)

Author keywords

acousto optics; depth profiling; low permittivity films; nanoacoustics; picosecond laser ultrasonics; transparent films

Indexed keywords

BRILLOUIN; DEGREE OF RELIABILITY; DEPTH PROFILE; INHOMOGENEITIES; LOW-K MATERIALS; NANO SCALE; NANO-MANUFACTURING; NANO-POROUS; NANO-SCALE IMAGING; NANOACOUSTICS; NANOMETRIC RESOLUTION; NANOMETROLOGY; NON-CONTACT; OPTICAL DETECTION; PHYSICAL AND CHEMICAL PROPERTIES; PICOSECOND ACOUSTICS; PICOSECOND LASER; SPATIAL RESOLUTION; SUBSURFACE INVESTIGATIONS; TIME-RESOLVED; TRANSPARENT FILMS;

CHEMICAL PROPERTIES; DEPTH PROFILING; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; REFRACTIVE INDEX; SURFACE DEFECTS;

INTERFACES (MATERIALS);

EID: 84863407850     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn204210u     Document Type: Article

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