Metal-oxide-semiconductor field effect transistor humidity sensor using surface conductance

Applied Physics Letters

Volumn 100, Issue 10, 2012, Pages

  Song, Seok Ho ^a   Yang, Hyun Ho ^a   Han, Chang Hoon ^a   Ko, Seung Deok ^a   Lee, Seok Hee ^a   Yoon, Jun Bo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE DISSIPATION; CHEMICAL VAPOR DEPOSITED; ELECTRICAL CHARGES; HIGH SENSITIVITY; LOW PRESSURES; METAL OXIDE SEMICONDUCTOR FIELD-EFFECT TRANSISTORS; SPECIFIC MATERIALS; SURFACE CONDUCTANCE; TIME CONSTANTS;

HUMIDITY SENSORS; SILICA;

ELECTRIC BREAKDOWN;

EID: 84863351110     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3691936     Document Type: Article

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