The pressfet: an integrated electret-mosfet based pressure sensor

Sensors and Actuators

Volumn 14, Issue 4, 1988, Pages 349-360

  Voorthuyzen, J A ^a   Bergveld, P ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRETS; SEMICONDUCTOR DEVICES, MOSFET;

AIR GAP; DIELECTRIC LAYER; HIGH TEMPERATURE SENSITIVITY; MAXIMUM SENSITIVITY; NMOS; PRESSURE SENSOR;

PRESSURE TRANSDUCERS;

EID: 0024056733     PISSN: 02506874     EISSN: None     Source Type: Journal    
DOI: 10.1016/0250-6874(88)80024-6     Document Type: Article

References (20)

1. J. A. Voorthuyzen and P. Bergveld, Theoretical considerations in the design of integrated semiconductor sensors applying electrets, IEEE Trans. Electron Devices, ED-32 (7) 1185 - 1190.
2. A theoretical analysis of the electret air gap field effect structure for sensor applications
3. The metal-nitride-oxide-silicon (MNOS) transistor — characteristics and applications
4. Micromechanical accelerometer integrated with MOS detection circuitry
5. Integrated silicon microbeam PI-FET accelerometer
6. MOS integrated silicon pressure sensor
7. A silicon pressure sensor using MOS ring oscillators
8. Structural composition of polymers relative to their plasma etch characteristics
9. Measurement of potential buildup and decay, surface charge density, and charging currents of corona-charged polymer foil electrets
10. Charging of polymer foils with monoenergetic low-energy electron beams
11. Production of high quasi-permanent charge densities on polymer foils by application of breakdown fields
12. Electrets formed by low-energy electron injection
13. Stability of liquid charged electrets
14. Storage and examination of high-resolution charge images in Teflon foils
15. Location of charge centroid in electron-beam-charged polymer films
16. The PRESSFET: an integrated electret-MOSFET structure for application as a catheter tip blood-pressure sensor
17. The influence of tensile forces on the deflection of circular diaphragms in pressure sensors