CMOS humidity sensor system using carbon nitride film as sensing materials

Sensors

Volumn 8, Issue 4, 2008, Pages 2662-2672

  Lee, Sung Pil ^a   Lee, Ji Gong ^b   Chowdhury, Shaestagir ^c  

^a Kyungnam University   (South Korea)

^b Case Western Reserve University   (United States)

^c INTEL CORPORATION   (United States)

Author keywords

Carbon nitride film; CMOS; Humidity; Integrated sensors

Indexed keywords

ANALOG MIXED CMOS; CARBON NITRIDE FILMS; HUMIDITY SENSITIVE; INTEGRATED HUMIDITY SENSOR; INTEGRATED SENSOR SYSTEM; INTEGRATED SENSORS; LIFTOFF TECHNIQUE; REACTIVE RF MAGNETRON SPUTTERING;

ATMOSPHERIC HUMIDITY; CMOS INTEGRATED CIRCUITS; FIELD EFFECT TRANSISTORS; HUMIDITY SENSORS; MAGNETRON SPUTTERING; PLASMA ETCHING; SILICON;

CARBON;

EID: 43049117544     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s8042662     Document Type: Article

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