Spectroscopic ellipsometry studies on various zinc oxide films deposited by ion beam sputtering at room temperature

Applied Optics

Volumn 51, Issue 9, 2012, Pages 1209-1215

  Hsu, Jin Cherng ^a   Lin, Yung Hsin ^a   Wang, Paul W ^b   Chen, Yu Yun ^a  

^a FU JEN CATHOLIC UNIVERSITY   (Taiwan)

^b BRADLEY UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; ION BEAMS; METALLIC FILMS; OPTICAL MULTILAYERS; REFRACTIVE INDEX; SPECTROSCOPIC ELLIPSOMETRY; SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC; ZINC OXIDE;

AMBIENT CONDITIONS; FILM SURFACES; FITTING MODEL; ION BEAM SPUTTER DEPOSITION; ION-BEAM SPUTTERING; OXYGEN PARTIAL PRESSURE; POLYCRYSTALLINE; SURFACE LAYERS;

OXIDE FILMS;

EID: 84863346376     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.51.001209     Document Type: Article

References (34)

1. M. H. Zhao, Z. L. Wang, and S. X. Mao, "Piezoelectric characterization of individual zinc oxide nanobelt probed by piezoresponse force microscope," Nano Lett. 4, 587-590 (2004). (Pubitemid 38586618)
2. D. S. Ginley and C. Bright, "Transparent conducting oxides," Mater. Res. Soc. Bull. 25, 15-18 (2000).
3. E. Budianu, M. Purica, F. Iacomi, C. Baban, P. Prepelita, and E. Manea, "Silicon metal-semiconductor-metal photodetector with zinc oxide transparent conducting electrodes," Thin Solid Films 516, 1629-1633 (2008). (Pubitemid 351172397)
4. Y. F. Chiang, C. C. Sung, and R. Ro, "Effects of metal buffer layer on characteristics of surface acoustic waves in ZnO/ metal/diamond structures," Appl. Phys. Lett. 96, 154104 (2010).
5. S. S. Jeong, A. Mittiga, E. Salza, A. Masci, and S. Passerini, "Electrodeposited ZnO/Cu2O heterojunction solar cells," Electrochim. Acta 53, 2226-2231 (2008). (Pubitemid 350298496)
6. Y. Y. Chen, J. C. Hsu, P.W.Wang, Y.W. Pai, C. Y.Wu, and Y. H. Lin, "Dependence of resistivity on structure and composition of AZO films fabricated by ion beam co-sputtering deposition," Appl. Surf. Sci. 257, 3446-3450 (2011).
7. G. Redmond, D. Fitzmaurice, and M. Graetzel, "Visible light sensitization by cis-bis (thiocyanato) bis (2,2'-bipyridyl-4,4'-dicarboxylato) ruthenium(II) of a transparent nanocrystalline ZnO film prepared by Sol-Gel techniques," Chem. Mater. 6, 686-691 (1994).
8. R. Menon, V. Gupta, H. H. Tan, K. Sreenivas, and C. Jagadish, "Origin of stress in radio frequency magnetron sputtered zinc oxide thin films," J. Appl. Phys. 109, 064905 (2011).
9. S. Kishimoto,T.Yamamoto,Y. Nakagawa, K. Ikeda, H. Makino, and T. Yamada, "Dependence of electrical and structural properties on film thickness of undoped ZnO thin films prepared by plasma-assisted electron beam deposition," Superlattices Microstruct. 39, 306-313 (2006). (Pubitemid 43005146)
10. N. Huby, S. Ferrari, E. Guziewicz, M. Godlewski, and V. Osinniy, "Electrical behavior of zinc oxide layers grown by low temperature atomic layer deposition," Appl. Phys. Lett. 92, 023502 (2008).
11. S. Ilican, Y. Caglar, and M. Caglar, "Preparation and characterization of ZnO thin films deposited by sol-gel spin coating method," J. Optoelectron Adv. Mater. 10, 2578-2583 (2008).
12. J. H. Lee, B. W. Yeo, and B. O. Park, "Effects of the annealing treatment on electrical and optical properties of ZnO transparent conduction films by ultrasonic spraying pyrolysis," Thin Solid Films 457, 333-337 (2004).
13. Y. R. Ryu, S. Zhu, J. D. Budai, H. R. Chandrasekhar, P. F. Miceli, and H. W. White, "Optical and structural properties of ZnO films deposited on GaAs by pulsed laser deposition," J. Appl. Phys. 88, 201-204 (2000).
14. V. V. Ratnikov, R. N. Kyutt, S. V. Ivanov, M. P. Scheglov, and A. Baar, "Microstructure and strain of ZnO molecular-beam epitaxial layers on sapphire," Semiconductors 44, 251-254 (2010).
15. J. C. Hsu and C. C. Lee, "Single-and dual-ion-beam sputter deposition of titanium oxide films," Appl. Opt. 37, 1171-1176 (1998).
16. C. C. Lee, J. C. Hsu, and D. H. Wong, "The characteristics of some metallic oxides prepared in high vacuum by ion beam sputtering," Appl. Surf. Sci. 171, 151-156 (2001).
17. P. L. Washington, H. C. Ong, J. Y. Dai, and R. P. H. Chang, "Determination of the optical constants of zinc oxide thin films by spectroscopic ellipsometry," Appl. Phys. Lett. 72, 3261-3263 (1998). (Pubitemid 128673622)
18. R. D. Sun, A. Nakajima, A. Fujishima, T. Watanabe, and K. Hashimoto, "Photoinduced surface wettability conversion of ZnO and TiO2 thin films," J. Phys. Chem. B 105, 1984-1990 (2001).
19. H. Noei, H. Qiu, Y. Wang, E. Löffler, C. Wöll, and M. Muhler, "The identification of hydroxyl groups on ZnO nanoparticles by infrared spectroscopy," Phys. Chem. Chem. Phys. 10, 7092-7097 (2008).
20. A. Önsten, D. Stoltz, P. Palmgren, S. Yu, M. Göthelid, andU. O. Karlsson, "Water adsorption on ZnO(0001): Transition from triangular surface structures to a disordered hydroxyl terminated phase," J. Phys. Chem. C 114, 11157-11161 (2010).
21. Y. Li, F. D. Valle, M. Simonnet, I. Yamada, and J. J. Delaunay, "Competitive surface effects of oxygen and water on UV photoresponse of ZnO nanowires," Appl. Phys. Lett. 94, 023110 (2009).
22. B. Meyer, "First-principles study of the polar O-terminated ZnO surface in thermodynamic equilibrium with oxygen and hydrogen," Phys. Rev. B 69, 045416 (2004).
23. C. T. Chang, J. C. Hsu, P. W. Wang, and Y. H. Lin, "ZnO thin films deposited with various oxygen partial pressures by ion beam sputtering at room temperature," in Proc. OPT'08 (Taiwan Optical Engineering Society, 2008).
24. J. F. Moulder, W. F. Stickle, P. E. Scbol, and K. D. Bomben, Handbook of X-ray Photoelectron Spectroscopy (Physical Electronic, Inc., 1995).
25. J. A.Woollam Co. Inc., Guide to UsingWVASE32(J. A.Woollam Co. Inc., 2008).
26. B. D. Cullity, Elements of X-ray Diffractions (Addison-Wesley, 1978).
27. W. T. Lim and C. H. Lee, "Highly oriented ZnO thin films deposited on RuSi substrates," Thin Solid Films 353, 12-15 (1999).
28. J. Tauc, R. Grigorovichi, and A. Vancu, "Optical properties and electronic structure of amorphous germanium," Phys. Status Solidi 15, 627-637 (1966).
29. B. V. Crist, Handbook of Monochromatic XPS Spectra (Wiley, 2000).
30. L. J. Meng, C. P. Moreira de Sá, and M. P. dos Santos, "Study of the structural properties of ZnO thin films by x-ray photoelectron spectroscopy," Appl. Surf. Sci. 78, 57-61 (1994).
31. X. Shao, K. I. Fukui, H. Kondoh, M. Shionoya, and Y. Iwasawa, "STM study of surface species formed by methanol adsorption on stoichiometric and reduced ZnO-10-10-surfaces," J. Phys. Chem. C 113, 14356-14362 (2009).
32. G. M. Hale and M. R. Querry, "Optical constants of water in the 200 nm to 200 μm wavelength range," Appl. Opt. 12, 555-563 (1973).
33. A. M. Clark, E. E. Fejer, A. G. Couper, and G. C. Jones, "Sweetite, a new mineral from Derbyshire," Mineral Mag. 48, 267-269 (1984).
34. H. K. Pulker, "Characterization of optical thin films," Appl. Opt. 18, 1969-1977 (1979).