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Volumn 100, Issue 25, 2012, Pages
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Improved sensing performance of polycrystalline-silicon based dual-gate ion-sensitive field-effect transistors using high-k stacking engineered sensing membrane
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Author keywords
[No Author keywords available]
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Indexed keywords
BOTTOM GATE;
CAPACITIVE COUPLINGS;
OPERATION MODE;
PH SENSITIVITY;
SENSING CHARACTERISTICS;
SENSING MARGIN;
SENSING MEMBRANES;
SENSING PERFORMANCE;
SINGLE GATES;
HAFNIUM OXIDES;
ION SENSITIVE FIELD EFFECT TRANSISTORS;
POLYSILICON;
SILICON OXIDES;
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EID: 84863320683
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.4729762 Document Type: Article |
Times cited : (28)
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References (17)
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