A digital output accelerometer using MEMS-based piezoelectric accelerometers and arrayed CMOS inverters with satellite capacitors

Smart Materials and Structures

Volumn 20, Issue 6, 2011, Pages

  Kobayashi, T ^a,b   Okada, H ^a,b   Masuda, T ^b,c   Maeda, R ^a   Itoh, T ^a,b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INVERTERS; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; DIGITAL OUTPUT; LOW LEVEL; OUTPUT VOLTAGES; PIEZO-ELECTRIC ACCELEROMETERS; SILICON ON INSULATOR WAFERS;

ACCELEROMETERS; CAPACITORS; DISTRIBUTED PARAMETER CONTROL SYSTEMS; ELECTROMECHANICAL DEVICES; MEMS; SATELLITES; SILICON WAFERS;

PIEZOELECTRIC DEVICES;

EID: 84863244332     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/20/6/065017     Document Type: Article

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