Role of geometric parameters in electrical measurements of insulating thin films deposited on a conductive substrate

Measurement Science and Technology

Volumn 23, Issue 3, 2012, Pages

  Kumar, S ^a   Gerhardt, R A ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

capacitance; dielectric spectroscopy; equivalent circuit analysis; finite element modelling; frequency dependence; impedance; impedance measurements; nanometrology; numerical simulation; resistance; thin films

Indexed keywords

CAPACITANCE; CAPACITANCE MEASUREMENT; COMPUTER SIMULATION; CONDUCTIVE FILMS; DIELECTRIC PROPERTIES; DIELECTRIC SPECTROSCOPY; ELECTRIC IMPEDANCE; ELECTRIC RESISTANCE; ELECTRODES; EQUIVALENT CIRCUITS; FILM THICKNESS; FINITE ELEMENT METHOD; INSULATION; MAXWELL EQUATIONS; PARAMETER ESTIMATION; SUBSTRATES;

DIELECTRIC MEASUREMENTS; ELECTRICAL MEASUREMENT; ELECTROMAGNETIC EQUATIONS; FINITE ELEMENT MODELLING; FREQUENCY DEPENDENCE; IMPEDANCE MEASUREMENT; NANOMETROLOGY; PARAMETRIC FINITE ELEMENTS;

THIN FILMS;

EID: 84863117783     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/23/3/035602     Document Type: Article

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