Anomaly of film porosity dependence on deposition rate

Applied Physics Letters

Volumn 100, Issue 6, 2012, Pages

  Stagon, Stephen P ^a   Huang, Hanchen ^a   Kevin Baldwin, J ^b   Misra, Amit ^b  

^a UNIVERSITY OF CONNECTICUT   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CU FILMS; DEPOSITION CONDITIONS; FILM POROSITY; GLANCING ANGLE DEPOSITION; NON-WETTING; UNIFORM FILMS;

DEPOSITION RATES; METALLIC FILMS; NANORODS; POROSITY; SILICON COMPOUNDS;

COPPER;

EID: 84863116244     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3683542     Document Type: Article

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