Effects of three-dimensional Ehrlich-Schwoebel barrier on texture selection during Cu nanorod growth

Applied Physics Letters

Volumn 91, Issue 12, 2007, Pages

  Johansen, Christopher G ^a   Huang, Hanchen ^a   Lu, Toh Ming ^b  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b Research Rensselaer Polytechnic Institute

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COPPER; GROWTH (MATERIALS); MOLECULAR DYNAMICS;

TEXTURE DESIGN; THREE-DIMENSIONAL EHRLICH-SCHWOEBEL (3D ES);

NANORODS;

EID: 34648833767     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2771525     Document Type: Article

References (21)

1. International Technology Roadmap for Semiconductors (ITRS), Semiconductor Industry Association (SRC), 2006.
2. S. Huang, H. Efstathiadis, and P. Haldar, Mater. Res. Soc. Symp. Proc. 836, L2.5.1 (2005).
3. K. L. Chopra, P. D. Paulson, and V. Dutta, Prog. Photovoltaics 12, 69 (2004).
4. D. Vick, L. J. Friedrich, S. K. Dew, M. J. Brett, K. Robbie, M. Seto, and T. Smy, Thin Solid Films 339, 88 (1999).
5. O. P. Karpenko, J. C. Bilello, and S. M. Yalisovem, J. Appl. Phys. 82, 1397 (1997).
6. H. C. Huang, H. L. Wei, C. H. Woo, and X. X. Zhang, Appl. Phys. Lett. 81, 4359 (2002).
7. F. Tang, C. Gaire, D.-X. Ye, T. Karabacak, T.-M. Lu, and G.-C. Wang, Phys. Rev. B 72, 035430 (2005).
8. P. Morrow, F. Tang, T. Karabacak, P.-I. Wang, D.-X. Ye, G.-C. Wang, and T.-M. Lu, J. Vac. Sci. Technol. A 24, 235 (2006).
9. G. H. Gilmer, H. C. Huang, T. Diaz de la Rubia, J. Dalla Torre, and F. Baumann, Thin Solid Films 365, 189 (2000).
10. A. van der Drift, Philips Res. Rep. 22, 267 (1967).
11. J. Wang, H. C. Huang, and T. S. Cale, Modell. Simul. Mater. Sci. Eng. 12, 1209 (2004).
12. G. Ehrlich and F. G. Hudda, J. Chem. Phys. 44, 1039 (1966).
13. R. L. Schwoebel and E. J. Shipsey, J. Appl. Phys. 37, 3682 (1966).
14. J. Wang, H. C. Huang, S. V. Kesapragada, and D. Gall, Nano Lett. 5, 2505 (2005).
15. J. Howe, Interfaces in Materials (Wiley, New York, 1997), p. 63.
16. Y. Mishin, M. Mehl, D. Papaconstantopouslos, A. F. Voter, and J. D. Kress, Phys. Rev. B 63, 224106 (2001).
17. H. C. Huang and J. Wang, Appl. Phys. Lett. 83, 4752 (2003).
18. L. G. Zhou and H. C. Huang, Appl. Phys. Lett. 84, 1940 (2004).
19. X. W. Zhou and H. N. G. Wadley, Surf. Sci. 431, 41 (1999).
20. O. S. Trushin, K. Kokko, P. T. Salo, W. Hergert, and M. Kotrla, Phys. Rev. B 56, 12135 (1997).
21. H. Jónsson and H. C. Andersen, Phys. Rev. Lett. 60, 2295 (1988).