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Volumn , Issue , 2011, Pages 563-570
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Full-chip through-silicon-via interfacial crack analysis and optimization for 3D IC
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Author keywords
[No Author keywords available]
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Indexed keywords
3-D ICS;
DESIGN OPTIMIZATION;
DIELECTRIC LINERS;
INTERFACIAL CRACKS;
MECHANICAL RELIABILITY;
RESPONSE SURFACE METHOD;
THERMO-MECHANICAL STRESS;
THROUGH-SILICON-VIA;
COMPUTER AIDED ANALYSIS;
COMPUTER AIDED DESIGN;
DESIGN OF EXPERIMENTS;
OPTIMIZATION;
STRESSES;
THREE DIMENSIONAL;
CRACKS;
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EID: 84862928895
PISSN: 10923152
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ICCAD.2011.6105386 Document Type: Conference Paper |
Times cited : (35)
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References (9)
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