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Volumn , Issue , 2011, Pages 563-570

Full-chip through-silicon-via interfacial crack analysis and optimization for 3D IC

Author keywords

[No Author keywords available]

Indexed keywords

3-D ICS; DESIGN OPTIMIZATION; DIELECTRIC LINERS; INTERFACIAL CRACKS; MECHANICAL RELIABILITY; RESPONSE SURFACE METHOD; THERMO-MECHANICAL STRESS; THROUGH-SILICON-VIA;

EID: 84862928895     PISSN: 10923152     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICCAD.2011.6105386     Document Type: Conference Paper
Times cited : (35)

References (9)
  • 1
    • 77956216567 scopus 로고    scopus 로고
    • TSV stress aware timing analysis with applications to 3d-ic layout optimization
    • J.-S. Yang, et al., "TSV Stress Aware Timing Analysis with Applications to 3D-IC Layout Optimization," in Proc. ACM Design Automation Conf., 2010.
    • (2010) Proc. ACM Design Automation Conf.
    • Yang, J.-S.1
  • 2
    • 70349675218 scopus 로고    scopus 로고
    • Failure mechanisms and optimum design for electroplated copper through-silicon vias (TSV)
    • X. Liu, et al., "Failure Mechanisms and Optimum Design for Electroplated Copper Through-Silicon Vias (TSV)," in IEEE Electronic Components and Technology Conf., 2009.
    • (2009) IEEE Electronic Components and Technology Conf.
    • Liu, X.1
  • 3
    • 77955187970 scopus 로고    scopus 로고
    • Thermal stress induced delamination of through silicon vias in 3-D interconnects
    • K. H. Lu, et al., "Thermal Stress Induced Delamination of Through Silicon Vias in 3-D Interconnects," in IEEE Electronic Components and Technology Conf., 2010.
    • (2010) IEEE Electronic Components and Technology Conf.
    • Lu, K.H.1
  • 4
    • 79960428792 scopus 로고    scopus 로고
    • Impact of near-surface thermal stresses on interfacial reliability of through-silicon-vias for 3-D interconnects
    • S.-K. Ryu, et al., "Impact of Near-Surface Thermal Stresses on Interfacial Reliability of Through-Silicon-Vias for 3-D Interconnects," in IEEE Trans. on Device and Material Reliability, 2010.
    • (2010) IEEE Trans. on Device and Material Reliability
    • Ryu, S.-K.1
  • 5
    • 70349670752 scopus 로고    scopus 로고
    • Thermo-mechanical reliability of 3-D ICs containing through silicon vias
    • K. H. Lu, et al., "Thermo-mechanical reliability of 3-D ICs containing through silicon vias," in IEEE Electronic Components and Technology Conf., 2009.
    • (2009) IEEE Electronic Components and Technology Conf.
    • Lu, K.H.1
  • 7
    • 70449088867 scopus 로고    scopus 로고
    • Performance and reliability analysis of 3dintegration structures employing through silicon via (TSV)
    • A. P. Karmarkar, et al., "Performance and Reliability Analysis of 3DIntegration Structures Employing Through Silicon Via (TSV," in IEEE Int. Reliability Physics Symposium, 2009.
    • (2009) IEEE Int. Reliability Physics Symposium
    • Karmarkar, A.P.1
  • 8
    • 76349097994 scopus 로고    scopus 로고
    • Multi-functional interconnect co-optimization for fast and reliable 3D stacked ICs
    • Y.-J. Lee, et al., "Multi-functional Interconnect Co-optimization for Fast and Reliable 3D Stacked ICs," in Proc. IEEE Int. Conf. on Computer- Aided Design, 2009.
    • (2009) Proc. IEEE Int. Conf. on Computer- Aided Design
    • Lee, Y.-J.1
  • 9
    • 76349113557 scopus 로고    scopus 로고
    • A study of through-silicon-via impact on the 3D stacked IC layout
    • D. H. Kim, et al., "A Study of Through-Silicon-Via Impact on the 3D Stacked IC Layout," in Proc. IEEE Int. Conf. on Computer-Aided Design, 2009.
    • (2009) Proc. IEEE Int. Conf. on Computer-Aided Design
    • Kim, D.H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.