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Volumn 6, Issue , 2011, Pages 1-7

Simultaneous fabrication of line defectsembedded periodic lattice by topographically assisted holographic lithography

Author keywords

Defect generation; Holographic lithography; Hot embossing; Phase shift lithography; Photonic crystal

Indexed keywords

FABRICATION; HOLOGRAMS; NANOSTRUCTURES; PERIODIC STRUCTURES; PHOTONIC CRYSTALS; PHOTORESISTS; DEFECTS; PHASE SHIFT;

EID: 84862913451     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-6-449     Document Type: Article
Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.