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Applied Physics A: Materials Science and Processing

Volumn 107, Issue 1, 2012, Pages 161-171

Non-vacuum, single-step conductive transparent ZnO patterning by ultra-short pulsed laser annealing of solution-deposited nanoparticles

(6) Lee, Daeho a Pan, Heng a Ko, Seung Hwan b Park, Hee K c Kim, Eunpa a Grigoropoulos, Costas P a

a UNIVERSITY OF CALIFORNIA (United States)

b Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

c AppliFlex LLC (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BACKGROUND GAS; CONDUCTIVE PATTERNS; CONDUCTIVITY ENHANCEMENT; ELECTRICALLY CONDUCTIVE; ENHANCED PERFORMANCE; FILM PROPERTIES; HIGH TEMPERATURE HEATING; LASER ANNEALING; LASER PARAMETERS; LASER POWER; NON-VACUUM; PARAMETRIC STUDY; PERFORMANCE TESTS; PHOTOLITHOGRAPHIC PROCESS; PULSED LASER ANNEALING; ROOM TEMPERATURE; SCANNING SPEED; SINGLE-STEP; THIN FILM TRANSISTORS (TFT); TRANSPARENT CONDUCTORS; TUNABILITIES; ZNO; ZNO FILMS; ZNO NANOPARTICLES; ZNO THIN FILM;

METALLIC FILMS; METAMATERIALS; NANOPARTICLES; OPTICAL FILMS; PHOTOLITHOGRAPHY; SEMICONDUCTOR LASERS; SYNTHESIS (CHEMICAL); THIN FILM TRANSISTORS; THIN FILMS; VACUUM; VACUUM FURNACES; ZINC OXIDE;

ANNEALING;

EID: 84862780450 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-012-6792-y Document Type: Article

Times cited : (42)

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