Determination of the metrological characteristics of optical surface topography measuring instruments

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8430, Issue , 2012, Pages

  Leach, R K ^a   Giusca, C L ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

areal surface topography; calibration; good practice; optical instruments; traceability; uncertainty

Indexed keywords

CROSSED GRATINGS; FOCUS VARIATION; GOOD PRACTICES; INTERNATIONAL STANDARDS; LASER INTERFEROMETER; MEASURING INSTRUMENTS; METROLOGICAL CHARACTERISTICS; PSEUDO RANDOM; SCANNING CONFOCAL MICROSCOPES; SCANNING INTERFEROMETERS; STYLUS INSTRUMENT; SURFACE STRUCTURING; SURFACE TEXTURE MEASUREMENT; SURFACE TEXTURES; TEST PROCEDURES; TRACEABILITY; UNCERTAINTY;

CALIBRATION; INTERFEROMETERS; LASER INTERFEROMETRY; OPTICAL INSTRUMENTS; SURFACE TOPOGRAPHY;

INSTRUMENTS;

EID: 84862298991     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.921452     Document Type: Conference Paper

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