Quantitative studies of long-term stable, top-down fabricated silicon nanowire pH sensors

Applied Physics A: Materials Science and Processing

Volumn 107, Issue 2, 2012, Pages 421-428

  Choi, Sun ^a   Park, Inkyu ^b   Hao, Zhao ^a   Holman, Hoi Ying N ^a   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

PASSIVATION LAYER; PH SENSITIVITY; QUANTITATIVE STUDY; SENSOR PERFORMANCE; SENSOR RESPONSE; SENSOR SURFACES; SILICON NANOWIRES; SYSTEMATIC STUDY; TOP-DOWN FABRICATION; TOPDOWN;

FABRICATION; NANOWIRES; PH; SENSORS; SILICON NITRIDE;

PH SENSORS;

EID: 84861571718     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-011-6754-9     Document Type: Article

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