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Volumn 9, Issue 5, 2009, Pages 1984-1988

Probing flow velocity with silicon nanowire sensors

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTES; COUNTERIONS; ELECTRICAL DOUBLE LAYERS; ELECTROLYTIC SOLUTION; IONIC PROPERTIES; IONIC TRANSPORTS; MICROFLUIDIC CHANNEL; NANOWIRE FET; NEW APPLICATIONS; QUANTITATIVE ANALYSIS; SILICA SUBSTRATE; SILICON NANOWIRES; STREAMING POTENTIAL; VELOCITY SENSING;

EID: 66449122140     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl900238a     Document Type: Article
Times cited : (82)

References (35)
  • 17
    • 84868941215 scopus 로고    scopus 로고
    • 3. The growth time was 15 min.
    • 3. The growth time was 15 min.
  • 18
    • 66449121112 scopus 로고    scopus 로고
    • Devices were fabricated on degenerately doped silicon wafers with 500 nm thermally grown oxides. SiNWs suspended in an ethanol solution were deposited onto the silicon substrate, and the source and drain electrodes were defined by photolithography, metallization of Ti/Pd (2 nm/50 nm) by an electron beam evaporator, and lift-off. The devices were further passivated by 2 of SU-8 (Microchem Corp.) with a second photolithography step.
    • Devices were fabricated on degenerately doped silicon wafers with 500 nm thermally grown oxides. SiNWs suspended in an ethanol solution were deposited onto the silicon substrate, and the source and drain electrodes were defined by photolithography, metallization of Ti/Pd (2 nm/50 nm) by an electron beam evaporator, and lift-off. The devices were further passivated by 2 of SU-8 (Microchem Corp.) with a second photolithography step.
  • 27
    • 84868941218 scopus 로고    scopus 로고
    • -3).
    • -3).
  • 29
    • 66449090719 scopus 로고    scopus 로고
    • Ethanol (CH3CH2OH) is an amphiprotic solvent that can accept and donate protons through autoprotolysis reaction [2CH 3CH2OH(aq) ↔ CH3CH2O, aq, CH3CH2OH2+(aq, see refs 30 and 31, Amphipro- tic solvents can also accept or donate protons if the system contains other proton donors/acceptors, such as the silica surface (Si-OH) or impurities like water (see refs 32 and 33, The existence of ions in ethanol is supported by the fact that the zeta potential of silica surface in ethanol was measured to be -72.6 mV (see ref 34, Moreover, streaming potential has been measured in ethanol and the reported streaming potential in ethanol was 2.4 times higher than that in water see ref 35
    • 2+(aq)] (see refs 30 and 31). Amphipro- tic solvents can also accept or donate protons if the system contains other proton donors/acceptors, such as the silica surface (Si-OH) or impurities like water (see refs 32 and 33). The existence of ions in ethanol is supported by the fact that the zeta potential of silica surface in ethanol was measured to be -72.6 mV (see ref 34). Moreover, streaming potential has been measured in ethanol and the reported streaming potential in ethanol was 2.4 times higher than that in water (see ref 35).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.