Embedding conductive patterns of elastomer nanocomposite with the assist of laser ablation

Microsystem Technologies

Volumn 18, Issue 3, 2012, Pages 365-371

  Liu, Chao Xuan ^a   Choi, Jin Woo ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE ELASTOMERS; CONDUCTIVE PATTERNS; FABRICATION TIME; FOCUSED LASER BEAMS; MICRO-FABRICATION TECHNIQUES; OPTICAL PROFILING; PIEZO-RESISTIVE; SENSING APPLICATIONS; SENSOR DEVICE; SENSOR MATERIALS; SPATIAL RESOLUTION; STRAIN SENSORS; THIN POLYMER FILMS;

ELASTOMERS; LASER ABLATION; PLASTICS; POLYMER FILMS; SENSORS; TENSILE STRAIN;

NANOCOMPOSITES;

EID: 84861530652     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-011-1399-3     Document Type: Article

References (21)

1. Arshak K, Perrem R (1993) Fabrication of a thin-film strain-gauge transducer using Bi2O3-V2O5. Sens Actuators A Phys 36:73-76
2. Dawan F, Jin Y, Goettert J, Ibekwe S (2008) High functionality of a polymer nanocomposite material for MEMS applications. Microsyst Technol 14:1451-1459
3. Ebara M, Hoffman JM, Hoffman AS, Stayton PS (2006) Switchable surface traps for injectable bead-based chromatography in PDMS microfluidic channels. Lab Chip 6:843-848 (Pubitemid 43962790)
4. Engel J, Chen J, Chen N, Pandya S, Liu C (2006) Multi-walled carbon nanotube filled conductive elastomers: materials and application to micro transducers. In: Proceedings of the 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, pp 246-249 (Pubitemid 44592276)
5. Gau C, Ko HS, Chen HT (2009) Piezoresistive characteristics of MWNT nanocomposites and fabrication as a polymer pressure sensor. Nanotechnology 20:185503
6. Hwang J, Jang J, Hong K, Kim KN, Han JH, Shin K, Park CE (2011) Poly(3-hexylthiophene) wrapped carbon nanotube/poly(dimethylsiloxane) composites for use in finger-sensing piezoresistive pressure sensors. Carbon 49:106-110
7. Khosla A, Gray BL (2010) Preparation, micro-patterning and electrical characterization of functionalized carbon-nanotube polydimethylsiloxane nanocomposite polymer. Macromol Symp 297:210-218
8. Lawes RA (2006) Manufacturing costs for microsystems/MEMS using high aspect ratio microfabrication techniques. Microsyst Technol 13:85-95
9. Lim HC, Schulkin B, Pulickal MJ, Liu S, Petrova R, Thomas G, Wagner S, Sidhu K, Federici JF (2005) Flexible membrane pressure sensor. Sens Actuators A Phys 119:332-335 (Pubitemid 40497174)
10. Lim KS, Chang WJ, Koo YM, Bashir R (2006) Reliable fabrication method of transferable micron scale metal pattern for poly(dimethylsiloxane) metallization. Lab Chip 6:578-580
11. Liu CX, Choi JW (2009) Patterning conductive PDMS nanocomposite in an elastomer using microcontact printing. J Micromech Microeng 19:085019
12. Liu CX, Choi JW (2010) Strain-dependent resistance of PDMS and carbon nanotubes composite microstructures. Nanotechnol IEEE Trans 9:590-595
13. Liu CX, Choi JW (2011) An ultra-sensitive nanocomposite pressure sensor patterned in a PDMS diaphragm. In: Proceedings of the 16th International Conference on Solid State Sensors, Actuators and Microsystems (TRANSDUCERS), Beijing, pp 2594-2597
14. 2laser. J Micromech Microeng 19:037002
15. McDonald JC, Whitesides GM (2002) Poly(dimethylsiloxane) as amaterial for fabricating microfluidic devices. Acc Chem Res 35:491-499
16. Miyako E, Nagata H, Hirano K, Hirotsu T (2009) Laser-triggered carbon nanotube microdevice for remote control of biocatalytic reactions. Lab Chip 9:788-794
17. Niu XZ, Peng SL, Liu LY, Wen WJ, Sheng P (2007) Characterizing and patterning of PDMS-based conducting composites. Adv Mater 19:2682-2686 (Pubitemid 47481836)
18. Pan T, Cong H (2008) Photopatternable conductive PDMS materials for microfabrication. Adv Func Mater 18:1912-1921
19. 2 laser ablation. Microsyst Technol 15:1027-1030
20. Watanabe H, Yamamoto M (1999) Chemical structure change of aKRF-laser irradiated PET fiber surface. J Appl Polym Sci 71:2027-2031
21. Yu MF, Lourie O, Dyer MJ, Moloni K, Kelly TF, Ruoff RS (2000) Strength and breaking mechanism of multiwalled carbon nanotubes under tensile load. Sci 287:637-640 (Pubitemid 30070908)