High functionality of a polymer nanocomposite material for MEMS applications

Microsystem Technologies

Volumn 14, Issue 9-11, 2008, Pages 1451-1459

  Dawan, Fareed ^a   Jin, Yoonyoung ^a   Goettert, Jost ^a   Ibekwe, Samuel ^b  

^a LOUISIANA STATE UNIVERSITY   (United States)

^b SOUTHERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; COMPOSITE MICROMECHANICS; ELECTRIC HEATING ELEMENTS; ELECTROMECHANICAL DEVICES; ELECTRONICS INDUSTRY; HEAT STORAGE; LIGHT SENSITIVE MATERIALS; LITHOGRAPHY; MEMS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MONOLITHIC INTEGRATED CIRCUITS; NANOSTRUCTURED MATERIALS; OPTICAL DESIGN; PHOTORESISTS; POLYMERS; THICK FILMS; VAPOR DEPOSITION;

A-CARBON; COMPARATIVE STUDIES; FILLER WEIGHT; FUNCTIONALIZED; HIGH-ASPECT-RATIO MICROSTRUCTURES; MECHANICAL CHARACTERISTICS; MEMS APPLICATIONS; MICRO-ELECTRO MECHANICAL SYSTEMS; MONOLITHICALLY INTEGRATED; NANO PARTICLES; POLYMER NANO COMPOSITES; RESISTIVE HEATING; SU-8 POLYMER; UV-LITHOGRAPHY; X-RAY LITHOGRAPHY;

NANOCOMPOSITES;

EID: 49949087174     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0577-4     Document Type: Conference Paper

References (9)

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