Silica-on-silicon waveguide integrated polydimethylsiloxane lab-on-a-chip for quantum dot fluorescence bio-detection

Journal of Biomedical Optics

Volumn 17, Issue 1, 2012, Pages

  Ozhikandathil, Jayan ^a   Packirisamy, Muthukumaran ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

Lab on a chip; Laser induced fluorescence; Polydymethylsiloxane; Quantum dots; Silica on silicon

Indexed keywords

BAYSILON; DIMETICONE; QUANTUM DOT; SILICON; SILICON DIOXIDE;

ARTICLE; CHEMISTRY; EQUIPMENT DESIGN; INSTRUMENTATION; METHODOLOGY; MICROFLUIDIC ANALYSIS; SPECTROFLUOROMETRY;

DIMETHYLPOLYSILOXANES; EQUIPMENT DESIGN; MICROFLUIDIC ANALYTICAL TECHNIQUES; QUANTUM DOTS; SILICON; SILICON DIOXIDE; SPECTROMETRY, FLUORESCENCE;

EID: 84861426691     PISSN: 10833668     EISSN: 15602281     Source Type: Journal    
DOI: 10.1117/1.JBO.17.1.017006     Document Type: Article

References (30)

1. A. Manz, N. Graber, and H. M. Widmer, "Miniaturized total chemical analysis systems: a novel concept for chemical sensing," Sensors Actuat. B. Chem. 1(1-6), 244-248 (1990). (Pubitemid 20699475)
2. D. R. Reyes et al., "Micro total analysis systems. Introduction, theory, and technology," Anal. Chem. 74(12), 2623-2636 (2002). (Pubitemid 34651165)
3. P. A. Auroux et al., "Micro total analysis systems. Analytical standard operations and applications," Anal. Chem. 74(12), 2637-2652 (2002).
4. T. Vilkner, D. Janasek, and A. Manz, "Micro total analysis systems recent developments," Anal. Chem. 76(12), 3373-3386 (2004). (Pubitemid 38747275)
5. K. B. Mogensen, J. El-Ali, A. Wolff, and J. P. Kutter, "Integration of polymer waveguides for optical detection in microfabricated chemical analysis systems," Appl. Opt. 42(19), 4072-4079 (2003).
6. H. Sato et al., "An all SU-8 microfluidic chip with built-in 3D fine microstructures," J. Micromech. Microeng. 16(11), 2318-2322 (2006). (Pubitemid 44679451)
7. G. S. Fiorini and D. T. Chiu, "Disposable microfluidic devices: fabrication, function, and application," BioTechniques 38(3), 429-446 (2005). (Pubitemid 40387670)
8. R. Pal et al., "An integrated microfluidic device for influenza and other genetic analyses," Lab. Chip 5(10), 1024-1032 (2005). (Pubitemid 41452991)
9. P. de la Fuente et al., "A SU-8 microfluidic total analysis system integrating silicon photodiodes and buried waveguides," in Electron Devices, 2005 Spanish Conference, 461-464, IEEE, Tarragona, Spain (2005). (Pubitemid 43996203)
10. S. Götz and U. Karst, "Recent developments in optical detection methods for microchipseparations," Anal. Bioanal. Chem. 387(1), 183-192 (2007). (Pubitemid 44956271)
11. N. P. Voloshina et al., "Alexa dyes, a series of new fluorescent dyes that yield exceptionally bright, photostable conjugates," J. Histochem. Cytochem. 47(9), 1179-1188 (1999).
12. K. E. Sapsford et al., "Biosensing with luminescent semiconductor QDs," Sensors 6(8), 925-953 (2006).
13. A. Chandrasekaran and M. Packirisamy, "Integrated microfluidic biophotonic chip for laser induced fluorescence detection," Biomed. Microdev. 12(5), 923-933 (2010).
14. D. A. Chang-Yen, R. K. Eich, and B. K. Gale, "A monolithic PDMS waveguide system fabricated using soft-lithography techniques," J. Lightwave Technol. 23(6), 2088-2093 (2005). (Pubitemid 41005097)
15. H. Ou, "Different index contrast silica-on-silicon waveguides by PECVD," Electron. Lett. 39(2), 212-213 (2003).
16. P. Friis et al., "Monolithicintegration of microfluidic channels and optical waveguides in silica on silicon," Appl. Opt. 40(34), 6246-6251 (2001).
17. J. Ozhikandathil and M. Packirisamy, "Silica-on-silicon (SOS)-PDMS platform integrated lab-on-a-chip (LOC) for quantum dot applications," Proc. SPIE 7750, 775004 (2010).
18. M. Packirisamy and A. Balakrishnan, "Planar waveguide based grating device and spectrometer for Species-specific wavelength detection," U.S PatentNo. 7324195 (2008).
19. T. Akimoto, H. Nanbu, and E. Ikawa, "Reactive ion etching lag on high rate oxide etching using high density plasma," JVSTB: Microelectron. Nanometer Struct. 13(6), 2390-2393 (1995).
20. L. A. Donohue et al., "Developments in Si and SiO2etching for MEMSbased optical applications," Proc. SPIE 5347, 44-53 (2004).
21. C. Hnatovsky et al., "Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching," Appl. Phys. A. 84(1), 47-61 (2006). (Pubitemid 43742184)
22. J. Ozhikandathil et al., "Low resistive silicon substrate as an etch stop layer for drilling thick SiO2 using spark assisted chemical engraving," Microsyst. Technol. 17(3), 373-380 (2011).
23. L. Szekely and R. Freitag, "Fabrication of a versatile microanalytical system without need for clean room conditions," Anal. Chim. Acta 512(1), 39-47 (2004). (Pubitemid 38595577)
24. K. Achuthan et al., "Investigation of pad deformation and conditioning during the CMP of silicon dioxide films," J. Electron. Mater. 25(10), 1628-1632 (1996). (Pubitemid 126581880)
25. Y. X. Li, P. J. French, and R. F. Wolffenbuttel, "Plasma planarization for sensor applications," J. MEMS 4(3), 132-138 (1995).
26. J. M. Ruano et al., "Design and fabrication of a silica on silicon integrated optical biochip as a fluorescence microarray platform," Biosens. Bioelectron. 18(2-3), 175-184 (2003). (Pubitemid 35477639)
27. E. R. Goldman et al., "Avidin: a natural bridge for quantum dot-antibody conjugates," Am. Chem. Soc. 124(22), 6378-6382 (2002). (Pubitemid 34579391)
28. E. R. Goldman et al., "Multiplexed Toxin Analysis Using Four Colors of Quantum Dot Fluororeagents," Anal. Chem. 76(3), 684-688 (2004). (Pubitemid 38166574)
29. L. Yang and Y. Li, "Simultaneous detection of Escherichia coli O157: H7 and Salmonella Typhimurium using quantum dots as fluorescence labels," Analyst 131(3), 394-401 (2006).
30. D. Gerion et al., "Room-temperature single-nucleotide polymorphism and multiallele DNA detection usingfluorescent nanocrystals and microarrays," Anal. Chem. 75(18), 4766-4772 (2003). (Pubitemid 37139776)