Different index contrast silica-on-silicon waveguides by PECVD

Electronics Letters

Volumn 39, Issue 2, 2003, Pages 212-213

  Ou, Haiyan ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BIREFRINGENCE; OXIDATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REACTIVE ION ETCHING; REFRACTIVE INDEX; SEMICONDUCTING GERMANIUM COMPOUNDS; SEMICONDUCTOR DOPING; SILICON WAFERS; SINGLE MODE FIBERS;

COUPLING LOSS; FLAME HYDROLYSIS DEPOSITION; MINIMAL BEND RADIUS; PROPAGATION LOSS;

OPTICAL WAVEGUIDES;

EID: 0037461904     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20030165     Document Type: Article

References (10)

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