A multi-step supervisory control strategy for semiconductor device manufacturing

Proceedings of the IEEE Conference on Decision and Control

Volumn 4, Issue , 2004, Pages 4237-4242

  Harrison, Christopher A ^a   Good, Richard ^a   Kadosh, Daniel ^b   Qin, S Joe ^a  

^a The University of Texas at Austin   (United States)

^b ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIFFERENTIAL EQUATIONS; ERROR ANALYSIS; FLASH MEMORY; FUNCTIONS; HIERARCHICAL SYSTEMS; MATRIX ALGEBRA; MEASUREMENT THEORY; MOS DEVICES; OPTIMIZATION; PARAMETER ESTIMATION; PERMITTIVITY; PREDICTIVE CONTROL SYSTEMS; WHITE NOISE;

FIRST-PRINCIPLES MODEL; FOWLER-NORDHEIM TUNNELING; PROCESS AUTOMATION; SUPERVISORY CONTROL STRATEGY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 14244260332     PISSN: 07431546     EISSN: 25762370     Source Type: Conference Proceeding    
DOI: 10.1109/cdc.2004.1429417     Document Type: Conference Paper

References (7)

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2. S. J. Qin and T. Sonderman, "From Chemical Process Control to Semiconductor Manufacturing Control," presented as keynote presentation at AEC/APC XIV Symposium, September 8-13, 2002.
3. R. Good, "The Control of Electrical Properties of Semiconductors," presented at Texas-Wisconsin Modeling and Control Consortium Spring Conference, February 10-11, 2003.
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6. J.B. Rawlings, "Tutorial Overview of Model Predictive Control," IEEE Control Systems Magazine, 20, pp. 38-52, 2000.
7. E. del Castillo, Statistical Process Adjustment for Quality Control, John Wiley & Sons, Inc.: New York, 2002