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Volumn 94, Issue , 2012, Pages 335-341

Spectrometric analysis of process etching solutions of the photovoltaic industry - Determination of HNO3, HF, and H2SiF 6 using high-resolution continuum source absorption spectrometry of diatomic molecules and atoms

Author keywords

Aluminum mono fluoride (AlF); Atomic absorption spectrometry (AAS); High resolution continuum source atomic absorption spectrometer; Molecular absorption spectrometry (MAS); Nitrous monoxide (NO); Silicon; Texturization

Indexed keywords

ABSORPTION SPECTROSCOPY; ATOMIC ABSORPTION SPECTROMETRY; ATOMS; FLUORINE COMPOUNDS; HYDROFLUORIC ACID; NITRIC ACID; PHOTOVOLTAIC CELLS; SILICON; SILICON COMPOUNDS; SILICON WAFERS; SOLAR CELLS; SPECTROMETERS;

EID: 84861233036     PISSN: 00399140     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.talanta.2012.03.052     Document Type: Article
Times cited : (31)

References (61)
  • 61
    • 84861234569 scopus 로고    scopus 로고
    • J. Acker, M. Steinert, V. Hoffmann, in preparation
    • J. Acker, M. Steinert, V. Hoffmann, in preparation.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.