Poly-SiGe-based CMUT array with high acoustical pressure

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 305-308

  Helin, Ph ^a   Czarnecki, P ^a   Verbist, A ^a   Bryce, G ^a   Rottenberg, X ^a   Severi, S ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

3-D ULTRASOUND; AC VOLTAGE; ACOUSTICAL PRESSURE; CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCER; CMOS COMPATIBLE; DIELECTRIC LAYER; ELECTRICAL FIELD; HIGH-DENSITY INTEGRATION; INTEGRATED ELECTRONICS; POLY-SIGE; POLYCRYSTALLINE SILICON GERMANIUMS; PULSE ECHOES;

HETEROJUNCTION BIPOLAR TRANSISTORS; POLYSILICON; SILICON ALLOYS; SILICON CARBIDE; TRANSDUCERS; ULTRASONIC IMAGING; ULTRASONIC TRANSDUCERS;

MEMS;

EID: 84860491073     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170155     Document Type: Conference Paper

References (10)

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