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Volumn 40, Issue 4, 2011, Pages 176-183

Red-Green-Blue wavelength interferometry and TV holography for surface metrology

Author keywords

Fringe analysis; Interferometry; Multiple wavelength; Phase shifting; Surface profiling; TV holography

Indexed keywords

FRINGE ANALYSIS; MULTIPLE WAVELENGTHS; PHASE-SHIFTING; SURFACE PROFILING; TV HOLOGRAPHY;

EID: 84859947256     PISSN: 09728821     EISSN: 09746900     Source Type: Journal    
DOI: 10.1007/s12596-011-0051-z     Document Type: Article
Times cited : (20)

References (16)
  • 2
    • 0037704611 scopus 로고    scopus 로고
    • Digital laser micro-interferometer and its applications
    • L. Yang, P. Colbourne, Digital laser micro-interferometer and its applications. Opt Eng 42, 1417-1426 (2003)
    • (2003) Opt Eng , vol.42 , pp. 1417-1426
    • Yang, L.1    Colbourne, P.2
  • 3
    • 56949087971 scopus 로고    scopus 로고
    • Recent developments in interferometry for microsystems metrology
    • N. Krishna Mohan, P.K. Rastogi, Recent developments in interferometry for microsystems metrology. Opt Lasers Eng 47, 349-354 (2009)
    • (2009) Opt Lasers Eng , vol.47 , pp. 349-354
    • Krishna Mohan, N.1    Rastogi, P.K.2
  • 4
    • 17644423213 scopus 로고
    • Step height measurement using two-wavelength phase-shifting interferometry
    • K. Creath, Step height measurement using two-wavelength phase-shifting interferometry. Appl Opt 26, 2810-2816 (1987)
    • (1987) Appl Opt , vol.26 , pp. 2810-2816
    • Creath, K.1
  • 5
    • 33847692334 scopus 로고    scopus 로고
    • Two-wavelength interferometry profilometry with a phase-step error - Compensating algorithm
    • J. Schmit, P. Hariharan, Two-wavelength interferometry profilometry with a phase-step error - compensating algorithm. Opt Eng 45, 115602-1-115602-3 (2006)
    • (2006) Opt Eng , vol.45 , pp. 1156021-1156023
    • Schmit, J.1    Hariharan, P.2
  • 7
    • 0027654026 scopus 로고
    • Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms
    • P. de Groot, L. Deck, Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms. Opt Lett 18, 1462-1464 (1993)
    • (1993) Opt Lett , vol.18 , pp. 1462-1464
    • De Groot, P.1    Deck, L.2
  • 8
    • 84906876958 scopus 로고
    • Surface profiling by analysis of white-light interferograms in the spatial frequency domain
    • P. de Groot, L. Deck, Surface profiling by analysis of white-light interferograms in the spatial frequency domain. J Mod Opt 42, 389-401 (1995)
    • (1995) J Mod Opt , vol.42 , pp. 389-401
    • De Groot, P.1    Deck, L.2
  • 9
    • 0030126002 scopus 로고    scopus 로고
    • High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferograms
    • P. Sandoz, G. Tribillon, H. Perrin, High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferogram. J Mod Opt 43, 701-708 (1996) (Pubitemid 126595027)
    • (1996) Journal of Modern Optics , vol.43 , Issue.4 , pp. 701-708
    • Sandoz, P.1    Tribillon, G.2    Perrin, H.3
  • 10
    • 35448952534 scopus 로고    scopus 로고
    • Experimental study of the phase-shift miscalibration error in phase-shifting interferometry: Use of a spectrally resolved white-light interferometer
    • DOI 10.1364/AO.46.005103
    • S.K. Debnath, M.P. Kothiyal, Experimental study of the phase-shift miscalibration error in phase shifting interferometry: use of a spectrally resolved white-light interferomete. Appl Opt 46, 5103-5109 (2006) (Pubitemid 47632067)
    • (2007) Applied Optics , vol.46 , Issue.22 , pp. 5103-5109
    • Debnath, S.K.1    Kothiyal, M.P.2
  • 11
    • 0022001763 scopus 로고
    • Multiple wavelength phase-shifting interferometry
    • Y.-Y. Cheng, J. Wyant, Multiple wavelength phase-shifting interferometry. Appl Opt 24, 804-807 (1985)
    • (1985) Appl Opt , vol.24 , pp. 804-807
    • Cheng, Y.-Y.1    Wyant, J.2
  • 12
    • 0037327769 scopus 로고    scopus 로고
    • Red-green-blue interferometer for the metrology of discontinuous structures
    • A. Pfortner, J. Schwider, Red-green-blue interferometer for the metrology of discontinuous structures. Appl Opt 42, 667-673 (2003)
    • (2003) Appl Opt , vol.42 , pp. 667-673
    • Pfortner, A.1    Schwider, J.2
  • 13
    • 67749093111 scopus 로고    scopus 로고
    • Measurement of discontinuous surfaces using multiple wavelength interferometry
    • U. Paul Kumar, N. Krishna Mohan, M.P. Kothiyal, Measurement of discontinuous surfaces using multiple wavelength interferometry. Opt Eng 48, 073603-1-073603-8 (2009)
    • (2009) Opt Eng , vol.48 , pp. 0736031-0736038
    • Paul Kumar, U.1    Krishna Mohan, N.2    Kothiyal, M.P.3
  • 14
    • 0004825579 scopus 로고    scopus 로고
    • Additive-Subtractive two-wavelength ESPI contouring by using a synthetic wavelength phase shift
    • E.Hack, B. Frei,R.Kästle,U. Sennhauser,Additive-Subtractive two-wavelength ESPI contouring by using a synthetic wavelength phase shift. Appl Opt 37, 2591-2597 (1998)
    • (1998) Appl Opt , vol.37 , pp. 2591-2597
    • Hack, E.1    Frei, B.2    Kästle, R.3    Sennhauser, U.4
  • 15
    • 70449454063 scopus 로고    scopus 로고
    • Deformation and shape measurement using multiple wavelength microscopic TV holography
    • U. Paul Kumar, N. Krishna Mohan, M.P. Kothiyal, Deformation and shape measurement using multiple wavelength microscopic TV holography. Opt Eng 48, 023601-1-023601-10 (2009)
    • (2009) Opt Eng , vol.48 , pp. 0236011-02360110
    • Paul Kumar, U.1    Krishna Mohan, N.2    Kothiyal, M.P.3
  • 16
    • 0001767220 scopus 로고    scopus 로고
    • Window function influence on phase error in phase-shifting algorithms
    • J. Schmit, K. Creath, Windows function influence on phase error in phase shifting algorithms. Appl Opt 35, 5642-5649 (1996) (Pubitemid 126627814)
    • (1996) Applied Optics , vol.35 , Issue.28 , pp. 5642-5649
    • Schmit, J.1    Creath, K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.