Recent developments in interferometry for microsystems metrology

Optics and Lasers in Engineering

Volumn 47, Issue 2, 2009, Pages 199-202

  Krishna Mohan, Nandigana ^a   Rastogi, Pramod K ^b  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

^b EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 56949087971     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2008.08.009     Document Type: Editorial

References (76)

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